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. Author manuscript; available in PMC: 2010 Oct 20.
Published in final edited form as: Acta Mech Sin. 2009 Feb 1;25(1):1–12. doi: 10.1007/s10409-008-0222-6

Figure 2.

Figure 2

Illustration of four methods for detecting cantilever motion with sub-nanometer precision –(Left) Laser-beam deflection method; (middle) Piezoresistive and piezoelectric method; and (Right) Capacitive method.