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. Author manuscript; available in PMC: 2010 Oct 20.
Published in final edited form as: Acta Mech Sin. 2009 Feb 1;25(1):1–12. doi: 10.1007/s10409-008-0222-6

Figure 4.

Figure 4

Change is the resistance of the piezoresistor vs. the thickness and length of the piezoresistor when a 2 N/m surface stress is applied on the surface of a SiO2 cantilever.