| U11 | U22 | U33 | U12 | U13 | U23 | |
| Cl1 | 0.0662 (5) | 0.0580 (5) | 0.0687 (5) | 0.0111 (4) | −0.0087 (4) | 0.0010 (4) |
| Cl2 | 0.0465 (5) | 0.1188 (8) | 0.0639 (5) | −0.0105 (4) | 0.0008 (4) | −0.0180 (4) |
| O1 | 0.0433 (10) | 0.0408 (10) | 0.0467 (10) | 0.0050 (8) | 0.0037 (8) | −0.0051 (8) |
| O2 | 0.0546 (12) | 0.0650 (12) | 0.0331 (9) | 0.0081 (9) | 0.0172 (8) | 0.0044 (8) |
| N1 | 0.0395 (12) | 0.0742 (15) | 0.0301 (10) | 0.0093 (11) | 0.0134 (9) | 0.0043 (10) |
| C1 | 0.0378 (14) | 0.0418 (15) | 0.0447 (14) | −0.0011 (11) | 0.0190 (12) | −0.0056 (11) |
| C2 | 0.0385 (14) | 0.0494 (15) | 0.0471 (14) | −0.0006 (12) | 0.0143 (12) | −0.0050 (12) |
| C3 | 0.0413 (15) | 0.072 (2) | 0.0493 (16) | −0.0100 (14) | 0.0171 (13) | −0.0125 (13) |
| C4 | 0.0540 (19) | 0.063 (2) | 0.077 (2) | −0.0235 (16) | 0.0271 (17) | −0.0257 (16) |
| C5 | 0.065 (2) | 0.0457 (17) | 0.083 (2) | −0.0081 (15) | 0.0309 (18) | −0.0068 (15) |
| C6 | 0.0488 (16) | 0.0464 (16) | 0.0572 (16) | −0.0010 (13) | 0.0221 (13) | 0.0010 (13) |
| C7 | 0.0431 (15) | 0.0535 (15) | 0.0365 (13) | 0.0059 (12) | 0.0091 (11) | −0.0027 (11) |
| C8 | 0.0415 (14) | 0.0389 (13) | 0.0355 (13) | −0.0004 (11) | 0.0122 (11) | −0.0018 (10) |
| C9 | 0.0357 (14) | 0.0663 (17) | 0.0349 (13) | 0.0041 (13) | 0.0108 (11) | −0.0024 (12) |
| C10 | 0.0514 (19) | 0.082 (2) | 0.074 (2) | 0.0149 (16) | 0.0221 (16) | 0.0184 (17) |
| C11 | 0.067 (2) | 0.108 (3) | 0.109 (3) | 0.038 (2) | 0.030 (2) | 0.031 (2) |
| C12 | 0.044 (2) | 0.172 (4) | 0.071 (2) | 0.020 (2) | 0.0023 (17) | −0.026 (3) |
| C13 | 0.048 (2) | 0.114 (3) | 0.122 (3) | −0.020 (2) | 0.033 (2) | −0.031 (3) |
| C14 | 0.055 (2) | 0.073 (2) | 0.093 (2) | −0.0116 (17) | 0.0266 (18) | −0.0106 (17) |
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