U11	U22	U33	U12	U13	U23
Cl1	0.0399 (3)	0.0813 (4)	0.0376 (2)	−0.0016 (2)	0.00670 (15)	0.00181 (19)
O1	0.0292 (6)	0.0561 (7)	0.0463 (6)	−0.0002 (5)	−0.0077 (4)	−0.0137 (5)
O2	0.0513 (7)	0.0577 (8)	0.0364 (6)	0.0083 (6)	−0.0084 (5)	−0.0005 (5)
O3	0.0542 (7)	0.0414 (6)	0.0466 (6)	0.0105 (5)	−0.0200 (5)	−0.0052 (5)
C1	0.0286 (7)	0.0260 (7)	0.0351 (7)	0.0025 (5)	−0.0004 (5)	−0.0043 (5)
C2	0.0416 (8)	0.0317 (8)	0.0385 (8)	0.0069 (6)	−0.0016 (6)	−0.0048 (6)
C3	0.0554 (9)	0.0328 (9)	0.0413 (8)	0.0008 (7)	0.0116 (8)	0.0006 (7)
C4	0.0395 (8)	0.0313 (8)	0.0536 (10)	−0.0038 (6)	0.0153 (7)	−0.0075 (7)
C5	0.0245 (7)	0.0363 (8)	0.0649 (10)	−0.0006 (6)	0.0027 (7)	−0.0195 (7)
C6	0.0268 (7)	0.0396 (9)	0.0635 (11)	0.0073 (6)	−0.0130 (7)	−0.0200 (8)
C7	0.0368 (8)	0.0295 (8)	0.0441 (8)	0.0104 (6)	−0.0112 (6)	−0.0111 (6)
C8	0.0274 (7)	0.0263 (7)	0.0398 (7)	0.0028 (5)	−0.0033 (5)	−0.0053 (6)
C9	0.0253 (7)	0.0237 (7)	0.0388 (7)	0.0025 (5)	0.0001 (5)	−0.0074 (5)
C10	0.0276 (7)	0.0267 (7)	0.0482 (9)	0.0006 (5)	0.0051 (6)	−0.0102 (6)
C11	0.0264 (7)	0.0290 (7)	0.0422 (8)	0.0029 (6)	−0.0056 (6)	−0.0043 (6)
C12	0.0213 (6)	0.0298 (7)	0.0402 (7)	0.0025 (5)	−0.0033 (5)	−0.0007 (6)
C13	0.0263 (7)	0.0305 (8)	0.0493 (8)	0.0003 (6)	−0.0043 (6)	−0.0018 (6)
C14	0.0274 (7)	0.0392 (9)	0.0502 (9)	−0.0027 (6)	−0.0010 (6)	0.0097 (7)
C15	0.0281 (7)	0.0448 (9)	0.0363 (7)	0.0057 (6)	0.0007 (6)	0.0059 (6)
C16	0.0312 (7)	0.0342 (8)	0.0383 (8)	0.0026 (6)	−0.0017 (6)	−0.0028 (6)
C17	0.0258 (7)	0.0298 (7)	0.0405 (8)	0.0001 (5)	−0.0008 (6)	0.0000 (6)
C18	0.0896 (14)	0.0381 (9)	0.0402 (9)	−0.0063 (9)	−0.0156 (9)	0.0008 (7)