U11	U22	U33	U12	U13	U23
C1	0.043 (2)	0.048 (2)	0.043 (2)	−0.0032 (18)	0.0138 (16)	−0.0068 (18)
C2	0.047 (2)	0.057 (2)	0.0348 (19)	0.0045 (19)	0.0106 (16)	−0.0028 (18)
C3	0.042 (2)	0.078 (3)	0.049 (2)	−0.007 (2)	0.0090 (17)	−0.010 (2)
C4	0.053 (2)	0.070 (3)	0.062 (3)	−0.008 (2)	0.028 (2)	−0.011 (2)
C5	0.071 (3)	0.074 (3)	0.044 (2)	−0.001 (2)	0.024 (2)	0.001 (2)
C6	0.049 (2)	0.073 (3)	0.040 (2)	−0.005 (2)	0.0084 (17)	−0.002 (2)
C7	0.042 (2)	0.043 (2)	0.039 (2)	−0.0041 (17)	0.0112 (15)	0.0051 (16)
C8	0.048 (2)	0.062 (3)	0.046 (2)	0.002 (2)	0.0106 (17)	−0.004 (2)
C9	0.044 (2)	0.063 (3)	0.060 (3)	0.007 (2)	0.0137 (19)	0.004 (2)
C10	0.044 (2)	0.056 (3)	0.048 (2)	−0.003 (2)	−0.0007 (17)	0.0099 (19)
C11	0.059 (2)	0.067 (3)	0.038 (2)	−0.006 (2)	0.0081 (18)	−0.001 (2)
C12	0.048 (2)	0.054 (2)	0.041 (2)	−0.0005 (19)	0.0140 (16)	−0.0013 (18)
C13	0.045 (2)	0.055 (2)	0.0329 (18)	0.0044 (19)	0.0056 (16)	0.0002 (17)
C14	0.042 (2)	0.047 (2)	0.0327 (18)	0.0010 (17)	0.0072 (15)	−0.0008 (16)
C15	0.049 (2)	0.052 (2)	0.039 (2)	−0.0023 (19)	0.0113 (18)	−0.0016 (18)
C16	0.069 (3)	0.076 (3)	0.038 (2)	−0.006 (2)	0.0140 (19)	0.002 (2)
C17	0.075 (3)	0.084 (3)	0.057 (3)	−0.013 (3)	0.025 (2)	−0.001 (2)
Cl1	0.0572 (7)	0.1132 (11)	0.0671 (8)	0.0017 (7)	−0.0137 (5)	0.0169 (7)
F1	0.0541 (13)	0.0976 (19)	0.0380 (12)	−0.0022 (13)	0.0054 (10)	0.0107 (12)
F2	0.0689 (16)	0.119 (2)	0.0845 (18)	−0.0260 (16)	0.0462 (14)	−0.0119 (17)
O3	0.0592 (18)	0.086 (2)	0.0644 (19)	−0.0014 (17)	0.0134 (15)	−0.0021 (17)
O1	0.0509 (16)	0.099 (2)	0.0377 (15)	−0.0153 (16)	0.0018 (12)	0.0063 (15)
O2	0.0487 (15)	0.0678 (18)	0.0382 (13)	−0.0050 (14)	0.0123 (11)	0.0020 (13)