U11	U22	U33	U12	U13	U23
S1	0.0785 (5)	0.0335 (3)	0.0492 (4)	−0.0010 (3)	0.0305 (3)	0.0058 (2)
O1	0.0468 (9)	0.0614 (11)	0.0707 (11)	−0.0059 (8)	0.0342 (8)	−0.0012 (9)
O2	0.0615 (10)	0.0249 (8)	0.0522 (9)	0.0007 (7)	0.0174 (8)	−0.0004 (7)
O3	0.0692 (11)	0.0348 (9)	0.0446 (9)	0.0068 (8)	0.0045 (8)	0.0012 (7)
N1	0.0498 (10)	0.0318 (9)	0.0347 (9)	−0.0012 (7)	0.0226 (8)	0.0015 (7)
N2	0.0510 (10)	0.0219 (8)	0.0409 (9)	0.0009 (7)	0.0224 (8)	−0.0030 (7)
C1	0.0456 (11)	0.0325 (11)	0.0356 (10)	−0.0020 (8)	0.0171 (9)	−0.0050 (8)
C2	0.0414 (11)	0.0391 (12)	0.0444 (11)	−0.0100 (9)	0.0142 (9)	−0.0054 (9)
C3	0.0393 (11)	0.0361 (11)	0.0454 (11)	0.0010 (8)	0.0215 (9)	0.0083 (9)
C4	0.0521 (12)	0.0385 (11)	0.0400 (11)	−0.0019 (9)	0.0264 (10)	−0.0029 (9)
C5	0.0419 (11)	0.0337 (11)	0.0358 (10)	−0.0082 (8)	0.0171 (9)	−0.0065 (8)
C6	0.0395 (10)	0.0237 (9)	0.0313 (9)	0.0004 (7)	0.0151 (8)	0.0028 (7)
C7	0.0415 (10)	0.0240 (9)	0.0331 (9)	−0.0002 (8)	0.0184 (8)	−0.0013 (7)
C8	0.0436 (11)	0.0294 (10)	0.0383 (10)	0.0022 (8)	0.0239 (9)	0.0033 (8)
C9	0.0372 (10)	0.0307 (10)	0.0387 (10)	−0.0005 (8)	0.0200 (9)	−0.0024 (8)
C10	0.0376 (10)	0.0270 (10)	0.0359 (10)	0.0006 (8)	0.0180 (8)	−0.0002 (8)
C11	0.0488 (13)	0.0345 (12)	0.0484 (12)	−0.0045 (9)	0.0161 (10)	−0.0061 (9)
C12	0.0380 (10)	0.0333 (11)	0.0405 (11)	0.0007 (8)	0.0187 (9)	0.0004 (8)
C13	0.0752 (18)	0.0447 (15)	0.0550 (15)	0.0156 (13)	0.0063 (13)	0.0100 (12)
C14	0.133 (3)	0.085 (3)	0.065 (2)	0.022 (2)	−0.013 (2)	0.0010 (19)
C15	0.0728 (17)	0.0696 (18)	0.094 (2)	0.0004 (14)	0.0614 (17)	0.0047 (16)
C16	0.0784 (18)	0.0486 (15)	0.0485 (14)	−0.0047 (13)	0.0173 (13)	0.0134 (11)
C17	0.129 (3)	0.067 (2)	0.0587 (17)	−0.014 (2)	0.045 (2)	−0.0015 (15)
C18	0.141 (4)	0.098 (3)	0.103 (3)	0.017 (3)	0.078 (3)	0.004 (2)