| U11 | U22 | U33 | U12 | U13 | U23 | |
| Cl1 | 0.0409 (3) | 0.0665 (4) | 0.0483 (3) | 0.01565 (19) | 0.0076 (2) | 0.00775 (19) |
| N1 | 0.0643 (14) | 0.0341 (10) | 0.0476 (12) | 0.000 | 0.0139 (10) | 0.000 |
| C3 | 0.0296 (7) | 0.0409 (8) | 0.0314 (7) | −0.0052 (6) | 0.0088 (6) | 0.0017 (6) |
| C1 | 0.0345 (10) | 0.0339 (10) | 0.0289 (10) | 0.000 | 0.0092 (8) | 0.000 |
| C2 | 0.0292 (7) | 0.0403 (8) | 0.0276 (7) | 0.0035 (6) | 0.0091 (6) | 0.0004 (5) |
| C4 | 0.0394 (11) | 0.0311 (10) | 0.0300 (10) | 0.000 | 0.0087 (8) | 0.000 |
| O1 | 0.0821 (12) | 0.0432 (8) | 0.1149 (15) | −0.0220 (8) | 0.0233 (11) | −0.0013 (9) |
| C5 | 0.0587 (16) | 0.0335 (12) | 0.0644 (17) | 0.000 | 0.0209 (13) | 0.000 |
| C6 | 0.0346 (8) | 0.0570 (10) | 0.0398 (8) | 0.0109 (7) | 0.0139 (7) | 0.0025 (7) |
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