U11	U22	U33	U12	U13	U23
Cl1	0.0406 (3)	0.0386 (3)	0.0306 (3)	0.00442 (17)	0.01531 (18)	0.01000 (17)
O1	0.0433 (7)	0.0275 (6)	0.0336 (7)	0.0019 (5)	0.0076 (5)	0.0034 (5)
O2	0.0438 (7)	0.0307 (7)	0.0318 (7)	0.0066 (5)	0.0122 (5)	0.0004 (5)
N1	0.0308 (7)	0.0245 (7)	0.0215 (7)	−0.0005 (5)	0.0071 (5)	0.0015 (5)
C1	0.0321 (8)	0.0380 (9)	0.0236 (8)	0.0098 (7)	0.0074 (6)	−0.0012 (7)
C2	0.0310 (8)	0.0294 (8)	0.0290 (8)	0.0061 (6)	0.0047 (7)	−0.0048 (6)
C3	0.0277 (8)	0.0254 (8)	0.0270 (8)	0.0030 (6)	0.0056 (6)	0.0007 (6)
C4	0.0245 (7)	0.0270 (8)	0.0228 (7)	0.0039 (6)	0.0063 (6)	0.0005 (6)
C5	0.0284 (8)	0.0280 (8)	0.0251 (8)	0.0015 (6)	0.0083 (6)	−0.0001 (6)
C6	0.0286 (8)	0.0314 (8)	0.0277 (8)	0.0064 (6)	0.0110 (6)	0.0043 (6)
C7	0.0295 (8)	0.0278 (8)	0.0265 (8)	−0.0057 (6)	0.0050 (6)	0.0039 (6)
C8	0.0376 (9)	0.0355 (9)	0.0237 (8)	−0.0080 (7)	0.0073 (7)	0.0024 (7)
C9	0.0389 (9)	0.0351 (9)	0.0240 (8)	−0.0076 (7)	0.0109 (7)	−0.0021 (7)
C10	0.0290 (8)	0.0285 (8)	0.0270 (8)	−0.0032 (6)	0.0093 (6)	−0.0012 (6)