U11	U22	U33	U12	U13	U23
Cl1	0.0508 (4)	0.0276 (3)	0.0642 (5)	−0.0062 (3)	0.0173 (3)	−0.0023 (3)
O1	0.0339 (9)	0.0328 (9)	0.0559 (11)	−0.0003 (7)	0.0190 (8)	−0.0044 (8)
O2	0.0438 (12)	0.0814 (16)	0.0696 (15)	0.0176 (11)	0.0135 (10)	0.0081 (12)
O3	0.0353 (9)	0.0315 (9)	0.0628 (12)	−0.0071 (7)	0.0207 (9)	−0.0071 (8)
O4	0.0525 (12)	0.0327 (10)	0.0694 (14)	−0.0093 (9)	0.0145 (10)	−0.0046 (9)
N1	0.0373 (12)	0.0223 (10)	0.0611 (14)	−0.0008 (9)	0.0158 (10)	−0.0023 (10)
N2	0.0325 (11)	0.0270 (11)	0.0661 (15)	−0.0004 (9)	0.0181 (10)	0.0036 (10)
N3	0.0276 (10)	0.0264 (10)	0.0527 (13)	−0.0003 (8)	0.0127 (9)	0.0009 (9)
C1	0.0330 (14)	0.0291 (13)	0.0715 (19)	−0.0040 (11)	0.0184 (13)	0.0048 (12)
C2	0.0279 (12)	0.0266 (12)	0.0412 (14)	0.0007 (9)	0.0083 (10)	0.0030 (10)
C3	0.0280 (12)	0.0289 (12)	0.0361 (13)	0.0010 (9)	0.0073 (10)	0.0027 (10)
C4	0.0311 (12)	0.0232 (11)	0.0424 (14)	0.0007 (9)	0.0091 (10)	0.0008 (10)
C5	0.0299 (12)	0.0299 (12)	0.0377 (13)	−0.0032 (10)	0.0080 (10)	0.0028 (10)
C6	0.0297 (12)	0.0329 (13)	0.0361 (13)	0.0023 (10)	0.0095 (10)	0.0009 (10)
C7	0.0361 (13)	0.0237 (11)	0.0447 (14)	0.0023 (10)	0.0107 (11)	−0.0030 (10)
C8	0.0299 (12)	0.0263 (12)	0.0394 (13)	−0.0007 (9)	0.0068 (10)	0.0027 (10)
C9	0.0431 (15)	0.0349 (14)	0.0490 (16)	0.0055 (12)	0.0147 (12)	−0.0035 (12)
C10	0.0493 (16)	0.0390 (15)	0.0512 (16)	0.0085 (12)	0.0221 (13)	0.0014 (13)
C11	0.045 (2)	0.152 (4)	0.135 (4)	0.034 (2)	0.019 (2)	−0.013 (4)
C12	0.0350 (14)	0.0305 (13)	0.0636 (18)	−0.0034 (11)	0.0162 (12)	−0.0027 (12)
C13	0.0448 (16)	0.0404 (15)	0.073 (2)	−0.0095 (12)	0.0240 (15)	−0.0085 (14)
C14	0.093 (3)	0.066 (2)	0.077 (3)	−0.032 (2)	0.031 (2)	−0.0167 (19)
C15	0.0338 (13)	0.0260 (12)	0.0403 (14)	0.0051 (10)	0.0125 (11)	0.0077 (10)
C16	0.0385 (14)	0.0353 (14)	0.0443 (15)	0.0027 (11)	0.0079 (11)	0.0015 (11)
C17	0.0542 (17)	0.0441 (16)	0.0466 (16)	0.0070 (13)	0.0167 (13)	−0.0070 (13)
C18	0.0421 (16)	0.0517 (17)	0.0538 (17)	0.0127 (13)	0.0230 (13)	0.0022 (14)
C19	0.0330 (13)	0.0352 (14)	0.0533 (17)	0.0038 (11)	0.0158 (12)	0.0107 (12)
C20	0.0346 (13)	0.0285 (12)	0.0496 (16)	0.0018 (10)	0.0123 (11)	−0.0001 (11)
C21	0.0387 (16)	0.0495 (17)	0.064 (2)	0.0052 (13)	0.0237 (14)	0.0062 (14)
C22	0.0416 (19)	0.077 (2)	0.082 (2)	−0.0098 (17)	0.0233 (17)	−0.0084 (19)