U11	U22	U33	U12	U13	U23
C1	0.0601 (15)	0.0357 (14)	0.0511 (13)	0.0050 (13)	0.0128 (12)	−0.0020 (11)
C2	0.0646 (18)	0.0412 (13)	0.0492 (13)	0.0076 (13)	0.0102 (12)	−0.0042 (11)
C3	0.0695 (19)	0.0686 (18)	0.0653 (17)	0.0051 (16)	0.0073 (14)	0.0003 (13)
C4	0.071 (2)	0.099 (2)	0.073 (2)	0.0125 (19)	0.0002 (17)	−0.0152 (19)
C5	0.100 (3)	0.089 (2)	0.0600 (19)	0.036 (2)	−0.0077 (18)	−0.0101 (17)
C6	0.131 (3)	0.072 (2)	0.0491 (16)	0.016 (2)	0.0083 (18)	0.0054 (14)
C7	0.093 (2)	0.0550 (17)	0.0504 (14)	0.0032 (15)	0.0121 (14)	0.0012 (12)
C8	0.0541 (16)	0.0349 (12)	0.0482 (13)	0.0057 (12)	0.0146 (11)	−0.0021 (11)
C9	0.0556 (15)	0.0437 (14)	0.0557 (14)	0.0016 (12)	0.0150 (12)	0.0043 (11)
C10	0.0700 (19)	0.0588 (15)	0.0510 (14)	0.0114 (14)	0.0184 (13)	0.0099 (12)
C11	0.0547 (17)	0.0721 (17)	0.0526 (14)	0.0143 (15)	0.0086 (12)	−0.0020 (14)
C12	0.0549 (16)	0.0659 (17)	0.0645 (16)	−0.0021 (13)	0.0205 (13)	−0.0069 (14)
C13	0.0566 (16)	0.0454 (13)	0.0541 (14)	0.0010 (13)	0.0204 (12)	−0.0024 (11)
N1	0.0636 (13)	0.0342 (11)	0.0531 (11)	0.0008 (11)	0.0117 (10)	0.0065 (9)
O1	0.0800 (12)	0.0347 (10)	0.0776 (11)	−0.0009 (9)	−0.0003 (9)	0.0063 (8)
Cl1	0.0783 (5)	0.0633 (4)	0.0772 (4)	−0.0034 (4)	0.0339 (4)	0.0109 (3)
Cl2	0.0706 (5)	0.1426 (8)	0.0752 (5)	0.0183 (5)	−0.0033 (4)	0.0119 (4)