U11	U22	U33	U12	U13	U23
Cl1	0.0524 (5)	0.0418 (5)	0.0215 (4)	0.0176 (4)	0.0002 (3)	−0.0001 (3)
S1	0.0231 (4)	0.0292 (4)	0.0215 (4)	0.0035 (3)	0.0058 (3)	0.0071 (3)
O1	0.0314 (11)	0.0232 (10)	0.0290 (11)	0.0051 (9)	0.0025 (9)	0.0052 (8)
O2	0.0362 (12)	0.0446 (13)	0.0254 (11)	0.0126 (10)	0.0133 (9)	0.0088 (9)
O3	0.0260 (11)	0.0348 (12)	0.0316 (12)	−0.0031 (9)	0.0010 (9)	0.0100 (9)
C1	0.0207 (14)	0.0289 (15)	0.0217 (14)	0.0066 (11)	0.0044 (11)	0.0070 (11)
C2	0.0173 (13)	0.0282 (14)	0.0217 (14)	0.0063 (11)	0.0039 (11)	0.0084 (11)
C3	0.0222 (14)	0.0257 (14)	0.0239 (14)	0.0057 (11)	0.0023 (11)	0.0054 (11)
C4	0.0273 (15)	0.0319 (16)	0.0218 (14)	0.0123 (12)	0.0035 (12)	0.0040 (12)
C5	0.0320 (16)	0.0381 (17)	0.0239 (15)	0.0135 (13)	0.0068 (13)	0.0125 (13)
C6	0.0304 (16)	0.0303 (16)	0.0351 (17)	0.0089 (13)	0.0093 (13)	0.0160 (13)
C7	0.0221 (14)	0.0243 (14)	0.0259 (15)	0.0074 (11)	0.0003 (11)	0.0051 (11)
C8	0.0241 (14)	0.0311 (15)	0.0242 (15)	0.0091 (12)	0.0036 (12)	0.0062 (12)
C9	0.0252 (14)	0.0237 (14)	0.0234 (14)	0.0007 (11)	0.0057 (12)	0.0085 (11)
C10	0.0324 (16)	0.0324 (16)	0.0271 (16)	0.0032 (13)	0.0025 (13)	0.0116 (13)
C11	0.0331 (17)	0.0439 (19)	0.046 (2)	0.0026 (15)	−0.0019 (15)	0.0262 (16)
C12	0.0329 (18)	0.0394 (19)	0.073 (3)	0.0131 (15)	0.0128 (18)	0.0329 (19)
C13	0.043 (2)	0.0264 (16)	0.062 (2)	0.0106 (15)	0.0213 (18)	0.0140 (16)
C14	0.0316 (16)	0.0244 (15)	0.0336 (17)	−0.0012 (12)	0.0078 (13)	0.0039 (12)
C15	0.0387 (18)	0.0331 (17)	0.0288 (16)	0.0081 (14)	−0.0004 (14)	−0.0004 (13)
Cl2	0.0602 (5)	0.0376 (4)	0.0227 (4)	0.0147 (4)	0.0028 (4)	0.0079 (3)
S2	0.0220 (4)	0.0284 (4)	0.0208 (4)	0.0028 (3)	0.0013 (3)	0.0037 (3)
O4	0.0357 (12)	0.0243 (10)	0.0332 (11)	0.0074 (9)	0.0082 (9)	0.0119 (9)
O5	0.0284 (11)	0.0342 (12)	0.0263 (11)	−0.0016 (9)	0.0059 (9)	0.0053 (9)
O6	0.0291 (11)	0.0441 (13)	0.0258 (11)	0.0092 (10)	−0.0025 (9)	0.0057 (9)
C16	0.0195 (14)	0.0266 (14)	0.0247 (14)	0.0060 (11)	0.0040 (11)	0.0054 (11)
C17	0.0191 (13)	0.0224 (14)	0.0255 (14)	0.0060 (11)	0.0042 (11)	0.0033 (11)
C18	0.0246 (14)	0.0217 (14)	0.0245 (14)	0.0040 (11)	0.0029 (12)	0.0051 (11)
C19	0.0316 (16)	0.0287 (15)	0.0229 (15)	0.0099 (12)	0.0046 (12)	0.0057 (12)
C20	0.0308 (16)	0.0271 (15)	0.0286 (16)	0.0059 (13)	−0.0029 (13)	−0.0023 (12)
C21	0.0296 (16)	0.0244 (15)	0.0378 (17)	0.0057 (12)	0.0035 (13)	0.0031 (13)
C22	0.0233 (14)	0.0239 (14)	0.0278 (15)	0.0075 (11)	0.0060 (12)	0.0074 (12)
C23	0.0282 (15)	0.0306 (16)	0.0282 (15)	0.0125 (12)	0.0084 (12)	0.0085 (12)
C24	0.0204 (14)	0.0215 (14)	0.0290 (15)	0.0004 (11)	−0.0008 (12)	0.0018 (11)
C25	0.0331 (16)	0.0329 (16)	0.0251 (15)	0.0065 (13)	0.0018 (13)	0.0011 (12)
C26	0.0364 (18)	0.0406 (19)	0.0387 (19)	0.0082 (15)	0.0091 (15)	−0.0068 (15)
C27	0.0289 (17)	0.0283 (17)	0.068 (3)	0.0069 (14)	0.0010 (17)	−0.0062 (16)
C28	0.0361 (18)	0.0215 (16)	0.072 (3)	0.0024 (14)	−0.0053 (18)	0.0160 (16)
C29	0.0304 (16)	0.0282 (16)	0.0431 (19)	−0.0012 (13)	0.0009 (14)	0.0155 (14)
C30	0.054 (2)	0.0414 (19)	0.0314 (17)	0.0169 (16)	0.0119 (15)	0.0183 (14)