U11	U22	U33	U12	U13	U23
Cu1	0.0393 (3)	0.0273 (3)	0.0255 (3)	0.0104 (2)	0.0087 (2)	0.0133 (2)
Cl1	0.0599 (6)	0.0441 (5)	0.0534 (6)	0.0137 (5)	0.0259 (5)	0.0190 (5)
O1	0.0505 (14)	0.0335 (12)	0.0335 (12)	0.0193 (11)	0.0002 (10)	0.0117 (10)
O2	0.0663 (16)	0.0310 (12)	0.0231 (11)	−0.0071 (11)	0.0028 (11)	0.0093 (10)
O3	0.0699 (17)	0.0442 (14)	0.0551 (15)	0.0328 (13)	0.0383 (13)	0.0372 (13)
O4	0.0416 (14)	0.0439 (14)	0.0435 (14)	0.0008 (11)	0.0087 (11)	0.0151 (12)
O5	0.0623 (18)	0.088 (2)	0.070 (2)	0.0023 (16)	−0.0133 (15)	0.0494 (19)
N1	0.0419 (16)	0.0337 (15)	0.0399 (15)	0.0157 (13)	0.0169 (12)	0.0237 (13)
N2	0.0422 (15)	0.0331 (14)	0.0248 (13)	0.0026 (12)	0.0077 (11)	0.0143 (12)
N3	0.0421 (15)	0.0299 (14)	0.0300 (14)	0.0139 (12)	0.0067 (12)	0.0141 (12)
N4	0.0353 (15)	0.0330 (15)	0.0333 (14)	0.0089 (12)	0.0074 (12)	0.0141 (12)
C1	0.0456 (19)	0.0255 (16)	0.0339 (17)	0.0049 (14)	0.0106 (15)	0.0117 (14)
C2	0.0448 (19)	0.0355 (18)	0.0335 (17)	0.0093 (15)	0.0032 (14)	0.0214 (15)
C3	0.0403 (19)	0.0323 (18)	0.0335 (18)	0.0067 (15)	0.0012 (15)	0.0090 (15)
C4	0.047 (2)	0.0410 (19)	0.0398 (18)	0.0225 (16)	0.0150 (15)	0.0240 (16)
C5	0.047 (2)	0.046 (2)	0.0327 (17)	0.0224 (17)	0.0174 (15)	0.0240 (16)
C6	0.048 (2)	0.0343 (18)	0.0359 (18)	0.0082 (15)	0.0176 (15)	0.0190 (15)