Table 1.
RMS roughness of sub-200 nm features | |
---|---|
Control | 4.1 ± 1.1 nm |
Heat-treated | 12.8 ± 1.7 nm |
RFGD-treated | 3.6 ± 0.9 nm |
Values are mean of at least 3 samples for each treatment (mean ± standard deviation).
RMS roughness of sub-200 nm features | |
---|---|
Control | 4.1 ± 1.1 nm |
Heat-treated | 12.8 ± 1.7 nm |
RFGD-treated | 3.6 ± 0.9 nm |
Values are mean of at least 3 samples for each treatment (mean ± standard deviation).