Table 1.
Silicon wafer characterization results.
d (SiO) (nm) | Hydro- | rms (nm) | (deg) | (deg) | (deg) | |
---|---|---|---|---|---|---|
2.0(1) | philic | 0.09(2) | 5(2) | Complete wetting | 11(3) | 13(4) |
192(1) | philic | 0.13(3) | 7(2) | Complete wetting | 17(3) | 15(3) |
2.0(1) | phobic | 0.12(2) | 111(1) | 107(1)° | 95(2) | 62(4) |
192(1) | phobic | 0.15(2) | 112(1) | 108(2)° | 92(2) | 63(3) |