U11	U22	U33	U12	U13	U23
Cu1	0.02196 (12)	0.01912 (12)	0.03468 (14)	0.00188 (8)	0.00948 (9)	0.00357 (9)
Cl1	0.0286 (2)	0.0299 (2)	0.0284 (2)	0.00289 (17)	0.00796 (18)	0.00106 (18)
O1	0.0300 (7)	0.0218 (7)	0.0391 (8)	0.0031 (5)	0.0133 (6)	0.0050 (6)
O2	0.0399 (8)	0.0251 (7)	0.0431 (8)	0.0101 (6)	0.0128 (7)	0.0037 (6)
O3	0.0284 (8)	0.0680 (13)	0.0458 (9)	0.0050 (8)	0.0016 (7)	0.0056 (9)
O4	0.0561 (10)	0.0443 (10)	0.0355 (8)	0.0040 (8)	0.0171 (7)	−0.0061 (7)
O5	0.0954 (16)	0.0274 (9)	0.0515 (11)	0.0022 (9)	0.0167 (10)	0.0023 (8)
O6	0.0375 (9)	0.0659 (13)	0.0562 (11)	0.0028 (8)	0.0248 (8)	0.0028 (9)
N1	0.0251 (8)	0.0227 (8)	0.0333 (8)	0.0019 (6)	0.0082 (6)	0.0011 (6)
N2	0.0253 (8)	0.0245 (8)	0.0276 (8)	−0.0015 (6)	0.0088 (6)	−0.0017 (6)
N3	0.0310 (10)	0.0249 (9)	0.0666 (15)	0.0059 (7)	0.0237 (10)	0.0115 (10)
C1	0.0320 (11)	0.0268 (10)	0.0480 (12)	0.0003 (8)	0.0132 (9)	0.0051 (9)
C2	0.0467 (13)	0.0245 (10)	0.0470 (13)	0.0005 (9)	0.0149 (10)	0.0051 (9)
C3	0.0416 (12)	0.0288 (11)	0.0378 (11)	0.0118 (9)	0.0062 (9)	0.0029 (9)
C4	0.0287 (10)	0.0347 (11)	0.0372 (11)	0.0091 (9)	0.0060 (8)	−0.0004 (9)
C5	0.0245 (9)	0.0263 (9)	0.0257 (9)	0.0023 (7)	0.0054 (7)	−0.0027 (7)
C6	0.0356 (11)	0.0284 (10)	0.0353 (10)	−0.0028 (8)	0.0131 (9)	−0.0010 (8)
C7	0.0436 (12)	0.0347 (12)	0.0442 (12)	−0.0134 (10)	0.0220 (10)	−0.0047 (10)
C8	0.0299 (10)	0.0483 (13)	0.0425 (12)	−0.0106 (10)	0.0168 (9)	−0.0093 (10)
C9	0.0254 (9)	0.0426 (12)	0.0337 (10)	−0.0007 (9)	0.0098 (8)	−0.0057 (9)
C10	0.0248 (9)	0.0289 (10)	0.0245 (8)	−0.0008 (7)	0.0074 (7)	−0.0049 (7)
C11	0.0261 (9)	0.0247 (9)	0.0309 (9)	0.0011 (7)	0.0042 (7)	0.0014 (8)
C12	0.0388 (12)	0.0332 (12)	0.0623 (15)	0.0089 (9)	0.0249 (11)	0.0115 (11)
C13	0.0427 (14)	0.0452 (15)	0.105 (3)	0.0125 (12)	0.0408 (16)	0.0190 (16)
O7	0.0602 (13)	0.0449 (11)	0.0585 (12)	0.0192 (9)	0.0318 (10)	0.0107 (9)