U11	U22	U33	U12	U13	U23
O1	0.0379 (11)	0.0266 (11)	0.0146 (9)	0.0096 (9)	−0.0039 (8)	0.0015 (8)
O2	0.0309 (10)	0.0230 (10)	0.0188 (10)	−0.0048 (8)	−0.0008 (8)	−0.0005 (8)
O3	0.0701 (17)	0.0318 (13)	0.0264 (12)	−0.0012 (12)	−0.0107 (11)	0.0029 (10)
O4	0.0320 (12)	0.0538 (15)	0.0203 (10)	0.0041 (10)	−0.0018 (9)	0.0118 (10)
O5	0.0772 (18)	0.0431 (14)	0.0259 (12)	0.0265 (13)	−0.0009 (12)	−0.0119 (11)
N1	0.0228 (12)	0.0233 (12)	0.0152 (11)	0.0005 (9)	−0.0016 (9)	0.0003 (9)
N2	0.0209 (11)	0.0306 (13)	0.0132 (11)	−0.0014 (10)	0.0004 (9)	0.0039 (9)
C1	0.0136 (12)	0.0223 (13)	0.0164 (13)	−0.0033 (10)	0.0020 (10)	−0.0001 (11)
C2	0.0201 (13)	0.0213 (14)	0.0197 (13)	0.0023 (10)	0.0027 (10)	0.0031 (11)
C3	0.0260 (14)	0.0207 (14)	0.0172 (13)	0.0012 (11)	0.0001 (10)	−0.0035 (11)
C4	0.0192 (13)	0.0249 (14)	0.0144 (12)	0.0032 (11)	0.0007 (10)	0.0034 (11)
C5	0.0221 (13)	0.0201 (14)	0.0214 (13)	0.0022 (11)	0.0006 (11)	0.0011 (11)
C6	0.0217 (13)	0.0228 (14)	0.0170 (13)	−0.0005 (11)	−0.0004 (11)	−0.0033 (11)
C7	0.0173 (13)	0.0225 (14)	0.0176 (13)	−0.0027 (10)	0.0029 (10)	0.0000 (11)
C8	0.0197 (13)	0.0303 (15)	0.0195 (14)	0.0004 (11)	0.0035 (11)	0.0013 (12)
C9	0.0184 (13)	0.0327 (16)	0.0198 (14)	−0.0033 (11)	0.0043 (11)	0.0066 (12)
C10	0.0333 (16)	0.0286 (16)	0.0242 (14)	−0.0018 (13)	0.0013 (12)	0.0074 (13)
C11	0.0371 (17)	0.0391 (18)	0.0211 (15)	−0.0053 (14)	−0.0013 (12)	0.0008 (13)
C12	0.0192 (14)	0.0471 (19)	0.0177 (14)	−0.0008 (13)	0.0011 (11)	0.0108 (13)
C13	0.0237 (14)	0.0358 (17)	0.0269 (16)	0.0055 (12)	0.0018 (12)	0.0123 (13)
C14	0.0235 (14)	0.0327 (16)	0.0249 (15)	0.0039 (12)	0.0043 (12)	0.0033 (12)
C15	0.0314 (17)	0.057 (2)	0.0263 (16)	0.0062 (16)	0.0018 (13)	0.0173 (16)