U11	U22	U33	U12	U13	U23
O1W	0.039 (3)	0.033 (3)	0.037 (2)	0.018 (2)	0.011 (2)	0.0050 (19)
O2W	0.083 (4)	0.032 (3)	0.046 (3)	−0.016 (3)	−0.019 (3)	0.008 (2)
O3W	0.059 (3)	0.027 (3)	0.037 (2)	0.000 (2)	−0.003 (2)	0.0035 (19)
O4W	0.044 (3)	0.034 (3)	0.061 (3)	−0.010 (2)	0.001 (2)	0.008 (2)
O5W	0.034 (3)	0.063 (4)	0.072 (3)	0.003 (2)	0.006 (2)	0.028 (3)
I1	0.0291 (2)	0.0148 (2)	0.03152 (18)	0.00230 (15)	0.01180 (15)	0.00385 (14)
I2	0.0374 (2)	0.0207 (2)	0.03183 (19)	−0.00250 (17)	0.01728 (17)	0.00016 (15)
I3	0.02080 (19)	0.0211 (2)	0.01620 (15)	0.00576 (15)	0.00688 (13)	0.00553 (13)
I4	0.02065 (19)	0.0215 (2)	0.02325 (16)	0.00578 (15)	0.00691 (14)	0.00628 (14)
N1	0.021 (2)	0.026 (3)	0.0111 (17)	0.009 (2)	0.0055 (16)	0.0093 (17)
C2	0.016 (3)	0.024 (3)	0.013 (2)	0.005 (2)	0.0072 (19)	0.005 (2)
C3	0.020 (3)	0.016 (3)	0.010 (2)	0.002 (2)	0.0079 (19)	0.0060 (19)
C4	0.015 (3)	0.009 (3)	0.017 (2)	−0.001 (2)	0.0066 (19)	0.0013 (19)
C5	0.013 (3)	0.010 (3)	0.020 (2)	−0.001 (2)	0.001 (2)	−0.0069 (19)
C6	0.020 (3)	0.028 (3)	0.008 (2)	0.001 (2)	0.0085 (19)	0.003 (2)
C7	0.033 (3)	0.043 (4)	0.014 (2)	0.019 (3)	0.008 (2)	0.011 (2)
S8	0.0166 (6)	0.0169 (7)	0.0104 (5)	0.0073 (5)	0.0068 (5)	0.0052 (5)
O9	0.027 (2)	0.030 (2)	0.0143 (15)	0.0194 (17)	0.0100 (14)	0.0111 (14)
O10	0.0186 (19)	0.029 (2)	0.0169 (15)	0.0085 (16)	0.0073 (14)	0.0054 (15)
N11	0.020 (2)	0.016 (2)	0.0162 (18)	0.0019 (19)	0.0064 (17)	−0.0004 (17)
C12	0.027 (3)	0.045 (4)	0.019 (2)	−0.007 (3)	0.002 (2)	0.000 (2)
C13	0.045 (4)	0.017 (3)	0.032 (3)	0.014 (3)	0.012 (3)	0.007 (2)
N14	0.020 (2)	0.017 (2)	0.0110 (17)	0.0109 (19)	0.0099 (16)	0.0027 (16)
C15	0.017 (3)	0.010 (3)	0.013 (2)	0.004 (2)	0.0037 (19)	−0.0021 (18)
C16	0.014 (2)	0.009 (3)	0.0121 (19)	0.003 (2)	0.0003 (18)	0.0009 (18)
C17	0.013 (2)	0.015 (3)	0.013 (2)	−0.001 (2)	0.0028 (18)	0.0013 (19)
C18	0.017 (3)	0.013 (3)	0.012 (2)	0.005 (2)	0.0078 (19)	−0.0003 (18)
C19	0.018 (3)	0.009 (3)	0.012 (2)	0.006 (2)	−0.0009 (19)	−0.0010 (18)
C20	0.018 (3)	0.016 (3)	0.0069 (19)	0.003 (2)	0.0046 (18)	−0.0002 (18)
O21	0.0182 (18)	0.0119 (19)	0.0200 (15)	0.0068 (15)	0.0084 (14)	0.0044 (14)
C22	0.031 (3)	0.033 (4)	0.033 (3)	0.020 (3)	0.025 (3)	0.013 (2)
C23	0.019 (3)	0.013 (3)	0.013 (2)	0.006 (2)	0.0072 (19)	0.0026 (18)
N24	0.022 (2)	0.009 (2)	0.0134 (17)	0.0030 (18)	0.0061 (16)	0.0032 (16)
C25	0.021 (3)	0.015 (3)	0.015 (2)	0.006 (2)	0.006 (2)	−0.0019 (19)
C26	0.026 (3)	0.023 (3)	0.026 (2)	0.010 (2)	0.010 (2)	0.004 (2)
C27	0.017 (3)	0.016 (3)	0.027 (2)	0.004 (2)	0.003 (2)	0.005 (2)
C28	0.027 (3)	0.018 (3)	0.040 (3)	0.001 (3)	0.002 (3)	−0.006 (2)
C29	0.027 (3)	0.012 (3)	0.020 (2)	0.005 (2)	0.005 (2)	0.004 (2)
N41	0.015 (2)	0.018 (2)	0.0118 (17)	0.0056 (18)	0.0040 (16)	0.0040 (16)
C42	0.018 (3)	0.019 (3)	0.011 (2)	0.006 (2)	0.0092 (19)	0.0050 (19)
C43	0.011 (2)	0.013 (3)	0.019 (2)	0.003 (2)	0.0057 (19)	0.0019 (19)
C44	0.016 (3)	0.008 (2)	0.013 (2)	0.003 (2)	0.0039 (19)	0.0030 (18)
C45	0.017 (3)	0.010 (3)	0.0083 (19)	0.003 (2)	0.0049 (18)	0.0022 (17)
C46	0.012 (2)	0.013 (3)	0.019 (2)	0.005 (2)	0.0088 (19)	0.0037 (19)
C47	0.024 (3)	0.034 (3)	0.016 (2)	0.014 (3)	0.008 (2)	0.012 (2)
S48	0.0197 (7)	0.0166 (7)	0.0100 (5)	0.0068 (5)	0.0079 (5)	0.0029 (5)
O49	0.024 (2)	0.017 (2)	0.0133 (14)	0.0087 (16)	0.0059 (14)	0.0050 (14)
O50	0.0163 (19)	0.024 (2)	0.0172 (15)	0.0073 (16)	0.0084 (14)	0.0061 (14)
N51	0.025 (2)	0.016 (2)	0.0178 (19)	0.0041 (19)	0.0074 (18)	0.0003 (17)
C52	0.038 (3)	0.014 (3)	0.029 (3)	0.005 (3)	0.013 (2)	0.003 (2)
C53	0.026 (3)	0.025 (3)	0.026 (3)	−0.002 (3)	0.004 (2)	0.000 (2)
N54	0.014 (2)	0.021 (2)	0.0113 (17)	0.0080 (18)	0.0051 (16)	0.0044 (16)
C55	0.012 (2)	0.020 (3)	0.011 (2)	0.007 (2)	0.0008 (18)	−0.0023 (19)
C56	0.019 (3)	0.010 (3)	0.012 (2)	0.006 (2)	0.0043 (19)	0.0023 (18)
C57	0.018 (3)	0.016 (3)	0.012 (2)	0.001 (2)	0.0027 (19)	0.0011 (19)
C58	0.014 (3)	0.015 (3)	0.0090 (19)	0.007 (2)	0.0026 (18)	0.0024 (18)
C59	0.017 (3)	0.009 (3)	0.0084 (19)	0.003 (2)	−0.0013 (18)	−0.0018 (17)
C60	0.018 (3)	0.015 (3)	0.014 (2)	0.006 (2)	0.0068 (19)	0.0022 (19)
O61	0.0165 (18)	0.023 (2)	0.0173 (15)	0.0080 (16)	0.0107 (14)	0.0070 (14)
C62	0.039 (4)	0.050 (4)	0.045 (3)	0.030 (3)	0.033 (3)	0.032 (3)
C63	0.017 (3)	0.014 (3)	0.015 (2)	0.002 (2)	0.0048 (19)	0.0026 (19)
N64	0.023 (2)	0.013 (2)	0.0151 (18)	0.0059 (19)	0.0065 (17)	0.0036 (16)
C65	0.022 (3)	0.018 (3)	0.018 (2)	0.007 (2)	0.009 (2)	0.006 (2)
C66	0.029 (3)	0.020 (3)	0.020 (2)	0.005 (2)	0.010 (2)	0.004 (2)
C67	0.018 (3)	0.018 (3)	0.022 (2)	0.001 (2)	0.006 (2)	0.002 (2)
C68	0.033 (3)	0.024 (3)	0.036 (3)	0.001 (3)	0.021 (3)	0.006 (2)
C69	0.039 (3)	0.012 (3)	0.025 (2)	0.010 (3)	0.005 (2)	0.007 (2)