U11	U22	U33	U12	U13	U23
N1	0.0479 (14)	0.0503 (14)	0.0474 (14)	−0.0055 (11)	−0.0176 (11)	0.0010 (11)
N2	0.088 (2)	0.0558 (15)	0.0618 (17)	−0.0246 (13)	−0.0409 (15)	0.0035 (12)
N3	0.0467 (14)	0.0515 (14)	0.0507 (15)	0.0004 (10)	−0.0223 (12)	−0.0041 (11)
O1	0.0670 (15)	0.0675 (14)	0.0497 (13)	−0.0009 (11)	−0.0118 (11)	−0.0012 (10)
O2	0.0748 (15)	0.0634 (13)	0.0592 (13)	−0.0091 (11)	−0.0332 (12)	0.0098 (10)
O3	0.130 (2)	0.0610 (15)	0.0685 (15)	−0.0418 (14)	−0.0493 (15)	0.0113 (11)
O4	0.0497 (12)	0.0750 (14)	0.0472 (12)	0.0076 (10)	−0.0202 (9)	0.0013 (10)
C1	0.060 (2)	0.0407 (16)	0.0516 (18)	−0.0073 (14)	−0.0207 (16)	0.0003 (13)
C2	0.0539 (18)	0.0430 (16)	0.0570 (18)	0.0003 (13)	−0.0233 (15)	−0.0048 (13)
C3	0.0460 (16)	0.0454 (15)	0.0483 (16)	−0.0040 (12)	−0.0214 (13)	−0.0028 (12)
C4	0.0469 (16)	0.0385 (14)	0.0454 (17)	−0.0041 (12)	−0.0180 (13)	−0.0050 (12)
C5	0.0521 (17)	0.0562 (18)	0.0506 (17)	0.0067 (14)	−0.0195 (14)	−0.0023 (14)
C6	0.0487 (17)	0.0651 (19)	0.0513 (18)	−0.0047 (14)	−0.0197 (14)	−0.0001 (14)
C7	0.0566 (18)	0.0502 (18)	0.0550 (19)	−0.0094 (14)	−0.0271 (15)	0.0013 (14)
C8	0.0476 (18)	0.072 (2)	0.066 (2)	0.0032 (15)	−0.0190 (15)	−0.0008 (16)
C9	0.067 (2)	0.106 (3)	0.0469 (19)	0.0100 (19)	−0.0218 (17)	0.0019 (18)
C10	0.091 (3)	0.061 (2)	0.0489 (19)	−0.0032 (18)	−0.0078 (18)	−0.0056 (15)
C11	0.183 (5)	0.084 (3)	0.081 (3)	−0.036 (3)	−0.008 (3)	−0.031 (2)
C12	0.109 (3)	0.071 (2)	0.059 (2)	−0.018 (2)	−0.020 (2)	0.0060 (17)
C13	0.123 (4)	0.124 (4)	0.072 (3)	0.029 (3)	0.012 (3)	0.001 (2)