U11	U22	U33	U12	U13	U23
N1	0.053 (3)	0.049 (3)	0.043 (3)	0.012 (2)	0.012 (2)	0.000 (2)
N2	0.068 (4)	0.063 (4)	0.042 (3)	−0.004 (3)	0.017 (3)	0.005 (2)
N3	0.052 (3)	0.061 (3)	0.041 (3)	0.000 (3)	0.010 (2)	0.001 (3)
N4	0.084 (5)	0.072 (5)	0.091 (5)	−0.008 (4)	0.020 (4)	0.010 (4)
N5	0.051 (3)	0.052 (3)	0.045 (3)	−0.006 (3)	0.005 (2)	0.000 (2)
N6	0.070 (4)	0.050 (3)	0.036 (3)	−0.004 (3)	0.019 (3)	0.003 (2)
N7	0.056 (3)	0.042 (3)	0.045 (3)	0.000 (2)	0.012 (2)	0.004 (2)
N8	0.069 (4)	0.059 (4)	0.075 (4)	−0.009 (3)	0.016 (3)	0.007 (3)
O1	0.067 (3)	0.046 (2)	0.036 (2)	0.013 (2)	0.0091 (18)	0.0019 (17)
O2	0.110 (4)	0.072 (3)	0.055 (3)	−0.020 (3)	0.031 (3)	0.010 (2)
O3	0.066 (3)	0.054 (3)	0.033 (2)	0.010 (2)	0.0065 (18)	0.0019 (17)
O4	0.111 (4)	0.060 (3)	0.048 (2)	−0.026 (3)	0.032 (3)	0.002 (2)
O5	0.059 (6)	0.055 (5)	0.102 (7)	0.002 (4)	0.018 (5)	−0.020 (5)
C1	0.057 (4)	0.037 (3)	0.035 (3)	−0.005 (3)	0.009 (3)	−0.001 (2)
C2	0.063 (4)	0.041 (3)	0.047 (4)	−0.002 (3)	0.017 (3)	−0.011 (3)
C3	0.073 (4)	0.055 (4)	0.043 (3)	−0.006 (4)	0.021 (3)	−0.013 (3)
C4	0.068 (4)	0.069 (5)	0.031 (3)	−0.019 (4)	0.002 (3)	−0.004 (3)
C5	0.049 (4)	0.050 (4)	0.041 (3)	0.000 (3)	0.000 (3)	−0.001 (3)
C6	0.057 (4)	0.074 (5)	0.039 (4)	0.003 (4)	−0.003 (3)	0.009 (3)
C7	0.064 (4)	0.070 (5)	0.062 (4)	0.019 (4)	0.004 (3)	0.014 (4)
C8	0.069 (4)	0.058 (4)	0.058 (4)	0.016 (4)	0.018 (3)	0.002 (3)
C9	0.046 (3)	0.037 (3)	0.034 (3)	−0.001 (3)	0.006 (2)	0.000 (2)
C10	0.061 (4)	0.039 (3)	0.050 (4)	0.003 (3)	0.004 (3)	−0.002 (3)
C11	0.065 (4)	0.049 (4)	0.047 (4)	0.001 (3)	0.010 (3)	0.006 (3)
C12	0.062 (4)	0.051 (4)	0.036 (3)	0.004 (3)	0.007 (3)	0.008 (3)
C13	0.057 (4)	0.054 (4)	0.044 (3)	0.002 (3)	0.011 (3)	0.007 (3)
C14	0.060 (4)	0.059 (4)	0.039 (3)	0.010 (3)	0.013 (3)	0.002 (3)
C15	0.046 (4)	0.049 (4)	0.049 (4)	0.003 (3)	0.003 (3)	0.004 (3)
C16	0.068 (4)	0.048 (4)	0.061 (4)	0.009 (3)	0.009 (3)	−0.006 (3)
C17	0.078 (5)	0.052 (5)	0.093 (6)	−0.003 (4)	0.007 (4)	−0.006 (4)
C18	0.075 (5)	0.084 (6)	0.069 (5)	0.006 (5)	0.017 (4)	0.006 (4)
C19	0.068 (4)	0.060 (4)	0.046 (4)	−0.003 (4)	0.009 (3)	0.003 (3)
C20	0.051 (3)	0.048 (3)	0.033 (3)	−0.006 (3)	0.003 (3)	−0.004 (3)
C21	0.063 (4)	0.064 (4)	0.041 (3)	−0.003 (3)	0.010 (3)	−0.011 (3)
C22	0.072 (5)	0.077 (5)	0.050 (4)	−0.019 (4)	0.023 (3)	−0.019 (4)
C23	0.072 (4)	0.087 (5)	0.036 (3)	−0.023 (4)	0.010 (3)	−0.004 (4)
C24	0.053 (4)	0.062 (4)	0.037 (3)	−0.021 (3)	0.005 (3)	0.004 (3)
C25	0.071 (5)	0.080 (5)	0.053 (4)	−0.017 (4)	−0.004 (4)	0.015 (4)
C26	0.065 (5)	0.065 (5)	0.070 (5)	−0.006 (4)	−0.009 (4)	0.020 (4)
C27	0.067 (5)	0.060 (4)	0.071 (5)	0.007 (4)	0.013 (4)	0.006 (4)
C28	0.046 (3)	0.055 (4)	0.035 (3)	−0.013 (3)	0.008 (3)	−0.006 (3)
C29	0.067 (4)	0.040 (3)	0.048 (3)	0.001 (3)	0.005 (3)	−0.002 (3)
C30	0.058 (4)	0.036 (3)	0.045 (3)	0.003 (3)	0.004 (3)	0.010 (3)
C31	0.058 (4)	0.044 (3)	0.042 (3)	−0.004 (3)	0.010 (3)	0.007 (3)
C32	0.064 (4)	0.045 (3)	0.040 (3)	−0.001 (3)	0.013 (3)	0.002 (3)
C33	0.054 (4)	0.055 (4)	0.045 (4)	−0.001 (3)	0.005 (3)	−0.001 (3)
C34	0.047 (3)	0.039 (3)	0.049 (4)	0.005 (3)	0.011 (3)	0.000 (3)
C35	0.060 (4)	0.056 (4)	0.057 (4)	−0.011 (3)	0.007 (3)	−0.009 (3)
C36	0.079 (5)	0.080 (5)	0.057 (4)	−0.018 (4)	0.023 (4)	0.004 (4)
C37	0.071 (5)	0.050 (4)	0.075 (5)	−0.005 (4)	0.005 (4)	−0.008 (4)
C38	0.062 (4)	0.060 (4)	0.059 (4)	−0.002 (4)	0.012 (3)	0.000 (3)