U11	U22	U33	U12	U13	U23
Cl13	0.0288 (2)	0.0370 (2)	0.01330 (17)	0.00223 (16)	0.00434 (14)	0.00022 (14)
N2	0.0178 (6)	0.0216 (6)	0.0138 (5)	−0.0009 (5)	0.0044 (4)	−0.0028 (4)
O20	0.0349 (6)	0.0259 (6)	0.0258 (5)	−0.0125 (5)	0.0143 (5)	−0.0024 (4)
F3	0.0326 (5)	0.0472 (6)	0.0402 (5)	−0.0209 (5)	0.0211 (4)	−0.0206 (5)
F2	0.0533 (6)	0.0441 (6)	0.0177 (4)	−0.0183 (5)	0.0001 (4)	−0.0012 (4)
N1	0.0180 (5)	0.0186 (6)	0.0126 (5)	−0.0015 (5)	0.0057 (4)	−0.0014 (4)
C10	0.0238 (7)	0.0184 (7)	0.0134 (6)	0.0030 (5)	0.0046 (5)	0.0000 (5)
C5	0.0177 (6)	0.0180 (7)	0.0159 (6)	0.0022 (5)	0.0080 (5)	0.0011 (5)
C18	0.0207 (7)	0.0180 (7)	0.0178 (6)	0.0029 (5)	0.0067 (5)	−0.0008 (5)
F1	0.0342 (5)	0.0427 (6)	0.0472 (6)	0.0054 (5)	0.0092 (5)	−0.0268 (5)
C11	0.0187 (6)	0.0189 (7)	0.0189 (6)	0.0009 (5)	0.0059 (5)	0.0001 (5)
C19	0.0188 (6)	0.0189 (7)	0.0170 (6)	0.0031 (5)	0.0089 (5)	0.0019 (5)
C7	0.0200 (6)	0.0141 (6)	0.0150 (6)	0.0016 (5)	0.0063 (5)	0.0008 (5)
C14	0.0171 (6)	0.0177 (7)	0.0142 (6)	−0.0010 (5)	0.0045 (5)	0.0013 (5)
C16	0.0259 (7)	0.0312 (8)	0.0191 (6)	−0.0075 (6)	0.0127 (6)	−0.0023 (6)
C6	0.0208 (7)	0.0240 (8)	0.0207 (7)	−0.0022 (6)	0.0084 (6)	−0.0033 (6)
C12	0.0215 (7)	0.0192 (7)	0.0171 (6)	0.0008 (5)	0.0093 (5)	0.0011 (5)
C4	0.0182 (6)	0.0186 (7)	0.0189 (6)	0.0001 (5)	0.0073 (5)	0.0009 (5)
C8	0.0199 (7)	0.0237 (7)	0.0193 (7)	−0.0004 (6)	0.0084 (5)	0.0003 (5)
C3	0.0166 (6)	0.0195 (7)	0.0191 (6)	0.0013 (5)	0.0066 (5)	−0.0008 (5)
C15	0.0238 (7)	0.0262 (8)	0.0172 (6)	−0.0032 (6)	0.0097 (6)	−0.0044 (6)
C17	0.0204 (7)	0.0213 (7)	0.0188 (6)	−0.0037 (6)	0.0048 (5)	0.0024 (5)
C9	0.0270 (7)	0.0280 (8)	0.0177 (6)	0.0000 (6)	0.0113 (6)	0.0009 (6)
C21	0.0495 (11)	0.0482 (11)	0.0253 (8)	−0.0297 (9)	0.0188 (8)	−0.0057 (7)