U11	U22	U33	U12	U13	U23
Ru1	0.00693 (9)	0.00402 (9)	0.00659 (9)	0.00017 (7)	0.00210 (7)	0.00032 (7)
Cl1	0.0146 (3)	0.0069 (3)	0.0095 (3)	0.0008 (2)	0.0030 (2)	0.0025 (2)
Cl2	0.0109 (3)	0.0061 (3)	0.0119 (3)	0.0004 (2)	0.0042 (2)	−0.0016 (2)
S1	0.0081 (3)	0.0058 (3)	0.0071 (3)	−0.0008 (2)	0.0020 (2)	0.0000 (2)
S2	0.0099 (3)	0.0056 (3)	0.0077 (3)	0.0003 (2)	0.0026 (2)	0.0005 (2)
S3	0.0086 (3)	0.0069 (3)	0.0087 (3)	0.0000 (2)	0.0028 (2)	0.0008 (2)
O1	0.0116 (9)	0.0101 (9)	0.0133 (9)	−0.0033 (7)	0.0060 (8)	0.0002 (7)
O2	0.0117 (9)	0.0097 (9)	0.0171 (10)	0.0036 (7)	0.0060 (8)	0.0003 (8)
O3	0.0093 (9)	0.0158 (9)	0.0127 (9)	−0.0009 (8)	0.0009 (7)	0.0055 (8)
O4	0.0108 (9)	0.0049 (8)	0.0132 (9)	−0.0012 (7)	0.0049 (7)	−0.0001 (7)
C1	0.0127 (13)	0.0110 (12)	0.0102 (12)	−0.0029 (10)	0.0024 (10)	−0.0015 (10)
C2	0.0131 (13)	0.0156 (14)	0.0110 (13)	−0.0005 (10)	0.0005 (10)	0.0025 (10)
C3	0.0146 (13)	0.0125 (12)	0.0113 (13)	0.0028 (11)	0.0038 (10)	0.0071 (10)
C4	0.0115 (12)	0.0086 (12)	0.0121 (13)	0.0040 (10)	0.0034 (10)	0.0024 (10)
C5	0.0143 (13)	0.0061 (11)	0.0123 (12)	−0.0014 (10)	0.0052 (10)	0.0009 (10)
C6	0.0160 (14)	0.0133 (13)	0.0135 (13)	−0.0039 (11)	0.0014 (11)	−0.0030 (11)
C7	0.0197 (15)	0.0130 (13)	0.0083 (12)	−0.0027 (11)	0.0014 (11)	−0.0033 (10)
C8	0.0161 (13)	0.0092 (12)	0.0080 (12)	0.0007 (10)	0.0044 (10)	0.0006 (10)
C9	0.0135 (13)	0.0131 (12)	0.0159 (13)	−0.0003 (11)	0.0086 (11)	−0.0031 (11)
C10	0.0138 (13)	0.0178 (14)	0.0156 (14)	−0.0047 (11)	0.0087 (11)	0.0012 (11)
C11	0.0180 (14)	0.0121 (12)	0.0156 (14)	−0.0055 (11)	0.0068 (11)	0.0024 (11)
C12	0.0107 (12)	0.0063 (11)	0.0199 (14)	−0.0030 (10)	0.0067 (11)	0.0009 (10)