U11	U22	U33	U12	U13	U23
O1	0.0500 (15)	0.0488 (15)	0.0426 (14)	−0.0022 (12)	−0.0119 (11)	0.0005 (12)
O2	0.0646 (18)	0.0432 (16)	0.0596 (17)	0.0030 (13)	0.0019 (13)	0.0194 (13)
O3	0.077 (2)	0.079 (2)	0.068 (2)	0.0443 (18)	0.0102 (16)	−0.0039 (17)
O4	0.0541 (17)	0.083 (2)	0.0536 (17)	0.0055 (15)	0.0154 (13)	0.0086 (16)
O5	0.0454 (14)	0.0389 (13)	0.0358 (13)	0.0092 (11)	0.0006 (10)	0.0073 (11)
O6	0.0398 (13)	0.0429 (14)	0.0400 (13)	0.0103 (11)	0.0065 (10)	−0.0039 (11)
N1	0.0279 (15)	0.064 (2)	0.0408 (17)	0.0085 (15)	0.0003 (12)	−0.0051 (16)
N2	0.0313 (14)	0.0257 (14)	0.0365 (14)	0.0058 (11)	0.0010 (11)	0.0049 (12)
C1	0.054 (3)	0.085 (3)	0.046 (2)	−0.005 (2)	−0.0129 (18)	0.001 (2)
C2	0.0359 (19)	0.042 (2)	0.0406 (19)	0.0052 (16)	0.0040 (15)	0.0079 (17)
C3	0.0281 (17)	0.0323 (18)	0.0358 (18)	−0.0028 (14)	−0.0015 (13)	0.0014 (14)
C4	0.0257 (16)	0.0305 (17)	0.0369 (18)	0.0034 (13)	0.0052 (13)	−0.0002 (14)
C5	0.0249 (16)	0.0276 (17)	0.0385 (18)	−0.0009 (13)	0.0038 (13)	−0.0059 (14)
C6	0.0273 (17)	0.0325 (18)	0.0369 (18)	−0.0028 (13)	−0.0024 (13)	0.0020 (14)
C7	0.0249 (16)	0.0341 (18)	0.0356 (17)	0.0060 (14)	0.0025 (13)	0.0005 (14)
C8	0.0280 (17)	0.0339 (18)	0.0348 (17)	0.0045 (14)	0.0039 (13)	−0.0040 (14)
C9	0.051 (2)	0.045 (2)	0.060 (2)	0.0147 (18)	0.0097 (18)	−0.0103 (19)
C10	0.0323 (18)	0.0338 (18)	0.044 (2)	0.0052 (14)	0.0025 (14)	0.0066 (15)
C11	0.0389 (19)	0.0320 (18)	0.0419 (19)	0.0012 (15)	0.0009 (15)	0.0072 (15)
C12	0.040 (2)	0.041 (2)	0.0394 (19)	0.0064 (16)	0.0013 (15)	0.0054 (16)
C13	0.051 (2)	0.041 (2)	0.043 (2)	0.0069 (17)	−0.0037 (16)	−0.0023 (17)
C14	0.077 (3)	0.058 (3)	0.043 (2)	0.007 (2)	−0.0016 (19)	−0.004 (2)
C15	0.070 (3)	0.071 (3)	0.043 (2)	0.011 (2)	−0.0005 (19)	0.013 (2)
C16	0.055 (2)	0.045 (2)	0.054 (2)	0.0093 (18)	0.0088 (18)	0.0187 (19)
C17	0.045 (2)	0.0331 (19)	0.051 (2)	0.0104 (16)	0.0081 (16)	0.0028 (17)