| U11 | U22 | U33 | U12 | U13 | U23 | |
| Cd1 | 0.02329 (12) | 0.02162 (12) | 0.03485 (14) | 0.00110 (11) | 0.00678 (12) | −0.00016 (12) |
| O1 | 0.0261 (15) | 0.0220 (14) | 0.0323 (16) | −0.0034 (12) | 0.0021 (12) | −0.0064 (12) |
| O2 | 0.048 (2) | 0.061 (3) | 0.0348 (19) | −0.006 (2) | 0.0054 (17) | −0.0208 (18) |
| O3 | 0.0271 (16) | 0.0336 (18) | 0.0366 (18) | −0.0081 (13) | −0.0058 (14) | 0.0037 (14) |
| O4 | 0.0236 (16) | 0.038 (2) | 0.070 (3) | 0.0085 (14) | 0.0058 (16) | 0.0222 (18) |
| O5 | 0.0288 (18) | 0.0344 (19) | 0.073 (3) | −0.0035 (15) | 0.0166 (18) | −0.0148 (19) |
| O6 | 0.0204 (17) | 0.061 (3) | 0.065 (3) | −0.0055 (17) | −0.0038 (17) | 0.032 (2) |
| N1 | 0.0189 (15) | 0.0203 (15) | 0.0224 (15) | −0.0018 (12) | −0.0004 (12) | −0.0030 (12) |
| N2 | 0.0208 (16) | 0.0201 (16) | 0.0285 (17) | 0.0002 (13) | −0.0048 (13) | −0.0031 (13) |
| N3 | 0.0211 (16) | 0.0265 (18) | 0.0294 (17) | 0.0019 (13) | −0.0018 (13) | −0.0039 (14) |
| N4 | 0.0150 (15) | 0.0250 (16) | 0.0288 (17) | −0.0040 (12) | 0.0019 (13) | 0.0020 (13) |
| N5 | 0.0177 (14) | 0.0298 (17) | 0.0227 (15) | 0.0007 (14) | 0.0019 (11) | −0.0016 (15) |
| N6 | 0.0159 (14) | 0.0253 (17) | 0.0291 (18) | 0.0024 (12) | 0.0017 (12) | −0.0001 (13) |
| C1 | 0.0201 (18) | 0.0230 (19) | 0.0234 (18) | 0.0004 (14) | −0.0040 (14) | −0.0028 (15) |
| C2 | 0.0174 (17) | 0.026 (2) | 0.0260 (19) | 0.0011 (14) | −0.0030 (14) | −0.0051 (15) |
| C3 | 0.0225 (19) | 0.030 (2) | 0.028 (2) | 0.0003 (16) | −0.0046 (16) | 0.0017 (17) |
| C4 | 0.033 (2) | 0.045 (3) | 0.0239 (19) | −0.0050 (19) | 0.0011 (17) | −0.0019 (18) |
| C5 | 0.040 (3) | 0.039 (3) | 0.029 (2) | 0.000 (2) | 0.0004 (19) | −0.012 (2) |
| C6 | 0.029 (2) | 0.033 (2) | 0.034 (2) | −0.0015 (16) | −0.0003 (19) | −0.009 (2) |
| C7 | 0.027 (2) | 0.0216 (19) | 0.034 (2) | 0.0015 (15) | −0.0083 (17) | −0.0071 (16) |
| C8 | 0.039 (2) | 0.035 (3) | 0.039 (2) | −0.001 (2) | −0.0045 (19) | −0.010 (2) |
| C9 | 0.058 (4) | 0.040 (3) | 0.042 (3) | 0.005 (3) | −0.014 (3) | −0.017 (2) |
| C10 | 0.058 (4) | 0.038 (3) | 0.060 (4) | −0.008 (3) | −0.014 (3) | −0.019 (3) |
| C11 | 0.040 (3) | 0.037 (3) | 0.059 (3) | −0.008 (2) | −0.007 (2) | −0.010 (2) |
| C12 | 0.035 (2) | 0.023 (2) | 0.048 (3) | −0.0033 (15) | −0.003 (2) | −0.015 (2) |
| C13 | 0.067 (4) | 0.039 (3) | 0.054 (3) | −0.027 (3) | 0.022 (3) | −0.019 (2) |
| C14 | 0.071 (5) | 0.088 (6) | 0.049 (3) | −0.009 (4) | 0.011 (3) | −0.039 (4) |
| C15 | 0.0172 (19) | 0.0297 (18) | 0.0232 (16) | 0.0001 (14) | 0.0050 (14) | 0.0005 (13) |
| C16 | 0.0228 (18) | 0.034 (2) | 0.0262 (18) | 0.0000 (18) | 0.0023 (14) | −0.0011 (19) |
| C17 | 0.023 (2) | 0.044 (3) | 0.025 (2) | −0.0029 (18) | −0.0042 (16) | 0.0062 (18) |
| C18 | 0.022 (2) | 0.043 (3) | 0.034 (2) | 0.0020 (19) | −0.0067 (17) | 0.010 (2) |
| C19 | 0.028 (2) | 0.034 (2) | 0.036 (2) | −0.0033 (18) | −0.0043 (18) | 0.0115 (19) |
| C20 | 0.0176 (16) | 0.033 (2) | 0.0311 (19) | 0.0018 (17) | 0.0027 (16) | 0.0057 (16) |
| C21 | 0.0144 (15) | 0.0309 (19) | 0.0237 (19) | 0.0040 (14) | 0.0040 (14) | −0.0017 (15) |
| C22 | 0.0186 (18) | 0.034 (2) | 0.034 (2) | 0.0083 (16) | 0.0056 (16) | 0.0106 (18) |
| C23 | 0.017 (2) | 0.062 (4) | 0.047 (3) | 0.008 (2) | −0.0005 (19) | 0.019 (3) |
| C24 | 0.0221 (19) | 0.051 (3) | 0.037 (2) | 0.000 (2) | −0.0034 (15) | 0.005 (2) |
| C25 | 0.019 (2) | 0.041 (3) | 0.038 (2) | 0.0002 (17) | 0.0052 (16) | 0.0045 (19) |
| C26 | 0.024 (2) | 0.027 (2) | 0.0243 (19) | 0.0000 (16) | 0.0000 (15) | 0.0013 (15) |
| C27 | 0.036 (2) | 0.053 (4) | 0.033 (2) | −0.013 (2) | −0.0098 (19) | 0.003 (2) |
| C28 | 0.029 (3) | 0.044 (3) | 0.107 (6) | 0.008 (2) | 0.004 (3) | 0.025 (3) |
| C30 | 0.031 (3) | 0.056 (4) | 0.052 (3) | −0.004 (2) | −0.008 (2) | 0.003 (3) |
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