U11	U22	U33	U12	U13	U23
Cl1	0.0448 (5)	0.0640 (7)	0.0615 (6)	−0.0018 (5)	−0.0062 (5)	−0.0015 (5)
Cl2	0.1071 (9)	0.0832 (8)	0.0447 (5)	−0.0501 (7)	−0.0081 (6)	0.0118 (5)
O1	0.0311 (14)	0.086 (2)	0.0376 (13)	−0.0010 (13)	0.0065 (11)	0.0017 (12)
C1	0.0311 (19)	0.037 (2)	0.0346 (17)	0.0016 (15)	0.0042 (15)	0.0061 (14)
C2	0.0328 (19)	0.038 (2)	0.0338 (17)	−0.0009 (15)	0.0062 (14)	0.0039 (14)
C3	0.038 (2)	0.060 (3)	0.0431 (19)	−0.0041 (18)	0.0083 (16)	−0.0082 (17)
C4	0.0317 (19)	0.051 (2)	0.054 (2)	0.0072 (16)	0.0020 (16)	−0.0050 (18)
C5	0.0316 (19)	0.046 (2)	0.0419 (18)	−0.0017 (16)	0.0002 (15)	0.0013 (16)
C6	0.0296 (18)	0.037 (2)	0.0336 (17)	0.0031 (14)	0.0025 (14)	0.0066 (14)
C7	0.032 (2)	0.054 (2)	0.0376 (18)	0.0038 (16)	0.0037 (15)	0.0027 (16)
C8	0.045 (2)	0.058 (2)	0.0338 (18)	0.0056 (18)	−0.0014 (16)	−0.0029 (17)
C9	0.050 (2)	0.055 (3)	0.040 (2)	0.0114 (19)	−0.0070 (17)	−0.0024 (17)
C10	0.068 (3)	0.078 (3)	0.050 (2)	0.011 (2)	−0.011 (2)	−0.014 (2)
C11	0.085 (4)	0.120 (4)	0.036 (2)	0.017 (3)	−0.008 (2)	−0.015 (3)
C12	0.076 (3)	0.134 (5)	0.041 (2)	0.001 (3)	0.010 (2)	0.007 (3)
C13	0.058 (3)	0.091 (3)	0.039 (2)	−0.003 (2)	0.0029 (19)	0.006 (2)
C14	0.0346 (19)	0.045 (2)	0.0405 (19)	−0.0006 (16)	0.0013 (15)	0.0063 (16)
C15	0.0365 (19)	0.044 (2)	0.0337 (17)	0.0016 (16)	0.0025 (15)	−0.0040 (15)
C16	0.058 (2)	0.041 (2)	0.0345 (18)	−0.0080 (18)	0.0020 (16)	−0.0019 (15)
C17	0.077 (3)	0.060 (3)	0.0318 (18)	−0.007 (2)	−0.0099 (19)	−0.0037 (18)
C18	0.062 (3)	0.070 (3)	0.051 (2)	−0.014 (2)	−0.010 (2)	−0.015 (2)
C19	0.054 (2)	0.066 (3)	0.056 (2)	−0.018 (2)	0.004 (2)	−0.009 (2)
C20	0.049 (2)	0.053 (2)	0.0370 (18)	−0.0034 (19)	0.0034 (16)	0.0057 (17)