| U11 | U22 | U33 | U12 | U13 | U23 | |
| Cl1 | 0.0318 (3) | 0.0392 (3) | 0.0202 (3) | 0.0063 (2) | 0.0064 (2) | 0.0025 (2) |
| Cl2 | 0.0281 (3) | 0.0258 (3) | 0.0401 (4) | −0.0015 (2) | 0.0128 (2) | 0.0010 (2) |
| Cl3 | 0.0394 (3) | 0.0294 (3) | 0.0264 (3) | −0.0015 (2) | 0.0102 (2) | −0.0048 (2) |
| O1 | 0.0158 (6) | 0.0169 (7) | 0.0145 (7) | 0.0007 (5) | 0.0034 (5) | 0.0060 (6) |
| O2 | 0.0184 (7) | 0.0165 (7) | 0.0168 (7) | 0.0003 (5) | 0.0079 (6) | 0.0046 (6) |
| N1 | 0.0192 (8) | 0.0095 (7) | 0.0115 (8) | −0.0006 (6) | 0.0053 (6) | 0.0004 (6) |
| C1 | 0.0184 (9) | 0.0062 (8) | 0.0120 (9) | 0.0000 (7) | 0.0023 (7) | −0.0009 (7) |
| C2 | 0.0165 (9) | 0.0087 (8) | 0.0127 (9) | −0.0017 (7) | 0.0047 (7) | −0.0021 (7) |
| C3 | 0.0230 (10) | 0.0084 (9) | 0.0124 (10) | −0.0012 (7) | 0.0050 (8) | 0.0004 (7) |
| C4 | 0.0195 (9) | 0.0115 (9) | 0.0143 (10) | 0.0017 (7) | 0.0005 (8) | 0.0010 (8) |
| C5 | 0.0144 (9) | 0.0128 (9) | 0.0189 (10) | 0.0006 (7) | 0.0047 (8) | 0.0000 (8) |
| C6 | 0.0188 (9) | 0.0084 (8) | 0.0121 (9) | −0.0021 (7) | 0.0050 (7) | −0.0023 (7) |
| C7 | 0.0170 (9) | 0.0116 (9) | 0.0167 (10) | −0.0024 (7) | 0.0066 (8) | −0.0008 (7) |
| C8 | 0.0188 (9) | 0.0080 (8) | 0.0126 (9) | 0.0003 (7) | 0.0070 (7) | −0.0024 (7) |
| C9 | 0.0151 (9) | 0.0138 (9) | 0.0186 (10) | −0.0007 (7) | 0.0072 (8) | 0.0011 (8) |
| C10 | 0.0171 (9) | 0.0148 (9) | 0.0164 (10) | 0.0021 (7) | 0.0021 (8) | 0.0024 (8) |
| C11 | 0.0220 (10) | 0.0222 (11) | 0.0179 (11) | −0.0021 (8) | 0.0105 (8) | 0.0048 (8) |
| C12 | 0.0190 (10) | 0.0284 (12) | 0.0214 (11) | 0.0022 (8) | 0.0049 (8) | 0.0025 (9) |
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