U11	U22	U33	U12	U13	U23
Cl1	0.0412 (3)	0.1022 (5)	0.1217 (6)	0.0083 (3)	0.0251 (3)	0.0142 (4)
O1	0.052 (2)	0.186 (11)	0.084 (3)	−0.001 (4)	−0.001 (2)	−0.047 (5)
O2	0.105 (4)	0.185 (9)	0.056 (3)	−0.001 (5)	0.016 (3)	0.012 (4)
O3	0.0420 (7)	0.1165 (13)	0.0417 (7)	0.0091 (8)	0.0094 (6)	−0.0118 (8)
O1'	0.070 (4)	0.173 (13)	0.055 (3)	0.043 (5)	0.007 (2)	−0.013 (4)
O2'	0.115 (7)	0.255 (18)	0.091 (7)	0.062 (10)	0.007 (5)	−0.080 (9)
N1	0.0612 (13)	0.1073 (17)	0.0606 (12)	0.0158 (13)	0.0106 (10)	−0.0208 (12)
N2	0.0388 (8)	0.0553 (10)	0.0491 (9)	−0.0003 (7)	0.0102 (7)	−0.0025 (7)
N3	0.0412 (8)	0.0512 (9)	0.0478 (9)	−0.0017 (7)	0.0083 (7)	−0.0007 (7)
C1	0.0465 (11)	0.0550 (12)	0.0571 (12)	0.0003 (9)	0.0106 (9)	−0.0026 (9)
C2	0.0503 (12)	0.0634 (14)	0.0702 (14)	0.0041 (10)	0.0232 (11)	0.0006 (11)
C3	0.0385 (10)	0.0570 (13)	0.0869 (16)	0.0007 (9)	0.0186 (11)	0.0079 (11)
C4	0.0429 (11)	0.0655 (13)	0.0699 (14)	−0.0021 (9)	0.0021 (10)	0.0061 (11)
C5	0.0455 (11)	0.0588 (12)	0.0561 (12)	−0.0017 (9)	0.0084 (9)	0.0023 (9)
C6	0.0394 (9)	0.0460 (10)	0.0554 (11)	−0.0029 (8)	0.0104 (8)	−0.0006 (8)
C7	0.0374 (9)	0.0472 (10)	0.0425 (9)	−0.0019 (7)	0.0072 (7)	−0.0006 (8)
C8	0.0469 (10)	0.0531 (11)	0.0378 (9)	−0.0022 (8)	0.0038 (8)	0.0008 (8)
C9	0.0515 (11)	0.0542 (11)	0.0380 (9)	−0.0012 (9)	0.0131 (8)	0.0004 (8)
C10	0.0418 (10)	0.0617 (12)	0.0441 (10)	0.0039 (8)	0.0139 (8)	0.0015 (9)
C11	0.0402 (10)	0.0668 (13)	0.0384 (9)	−0.0008 (9)	0.0074 (7)	0.0002 (9)
C12	0.0418 (10)	0.0606 (12)	0.0381 (9)	0.0003 (8)	0.0102 (8)	−0.0032 (8)
C13	0.0651 (13)	0.0909 (17)	0.0408 (10)	0.0048 (12)	0.0178 (10)	−0.0003 (11)
C14	0.0399 (11)	0.115 (2)	0.0415 (10)	0.0116 (11)	0.0065 (8)	−0.0021 (11)
C15	0.0470 (12)	0.156 (3)	0.0552 (13)	0.0292 (15)	0.0053 (10)	0.0027 (15)
C16	0.0679 (16)	0.170 (3)	0.0488 (13)	0.0225 (18)	0.0092 (11)	0.0315 (16)
C17	0.0536 (14)	0.154 (3)	0.0663 (15)	−0.0061 (16)	−0.0019 (11)	−0.0380 (17)