U11	U22	U33	U12	U13	U23
S1	0.01673 (9)	0.02390 (10)	0.01613 (9)	−0.00032 (6)	−0.00311 (6)	0.00034 (9)
O1	0.0181 (3)	0.0441 (5)	0.0164 (3)	−0.0106 (3)	−0.0019 (2)	0.0083 (3)
O2	0.0169 (2)	0.0225 (3)	0.0104 (2)	−0.0028 (2)	0.00034 (19)	0.00240 (19)
O3	0.0152 (2)	0.0203 (3)	0.0130 (2)	−0.00066 (19)	−0.00317 (18)	−0.0026 (2)
O4	0.0148 (2)	0.0241 (3)	0.0136 (2)	−0.0053 (2)	0.0005 (2)	0.0021 (2)
C1	0.0243 (4)	0.0266 (4)	0.0127 (3)	0.0053 (3)	−0.0033 (3)	−0.0005 (3)
C2	0.0220 (4)	0.0247 (4)	0.0185 (3)	0.0027 (3)	0.0059 (3)	0.0038 (3)
C3	0.0144 (3)	0.0203 (3)	0.0108 (3)	0.0051 (2)	−0.0017 (2)	−0.0003 (2)
C4	0.0135 (3)	0.0168 (3)	0.0129 (3)	0.0002 (2)	−0.0012 (2)	0.0020 (2)
C5	0.0142 (3)	0.0215 (3)	0.0128 (3)	−0.0013 (3)	−0.0015 (2)	0.0025 (2)
C6	0.0147 (3)	0.0199 (3)	0.0138 (3)	−0.0014 (2)	−0.0017 (2)	0.0012 (2)
C7	0.0134 (3)	0.0206 (3)	0.0125 (3)	−0.0006 (2)	−0.0014 (2)	0.0006 (2)
C8	0.0123 (3)	0.0168 (3)	0.0108 (2)	0.0004 (2)	−0.0006 (2)	−0.0002 (2)
C9	0.0125 (3)	0.0169 (3)	0.0117 (3)	−0.0006 (2)	−0.0001 (2)	0.0002 (2)
C10	0.0128 (3)	0.0149 (3)	0.0101 (3)	0.0006 (2)	0.0003 (2)	0.0001 (2)
C11	0.0130 (3)	0.0153 (3)	0.0105 (2)	−0.0002 (2)	−0.0003 (2)	−0.0003 (2)
C12	0.0127 (3)	0.0157 (3)	0.0116 (3)	−0.0003 (2)	0.0010 (2)	−0.0007 (2)
C13	0.0129 (3)	0.0178 (3)	0.0113 (3)	0.0000 (2)	0.0002 (2)	0.0001 (2)
C14	0.0186 (3)	0.0206 (4)	0.0152 (3)	−0.0016 (3)	0.0039 (2)	0.0030 (3)
C15	0.0174 (3)	0.0188 (3)	0.0246 (4)	0.0001 (3)	−0.0066 (3)	−0.0001 (3)
C16	0.0171 (3)	0.0252 (4)	0.0168 (3)	−0.0013 (3)	0.0032 (3)	0.0051 (3)