| U11 | U22 | U33 | U12 | U13 | U23 | |
| C1 | 0.098 (2) | 0.127 (3) | 0.090 (2) | −0.013 (2) | −0.0110 (17) | −0.020 (2) |
| C21 | 0.083 (2) | 0.079 (3) | 0.0532 (18) | −0.0054 (19) | −0.0087 (14) | −0.0045 (17) |
| C22 | 0.23 (2) | 0.108 (13) | 0.073 (9) | −0.074 (15) | 0.022 (11) | −0.019 (9) |
| C3 | 0.0970 (19) | 0.0839 (19) | 0.0817 (16) | 0.0192 (17) | −0.0228 (14) | −0.0244 (16) |
| O4 | 0.0857 (11) | 0.0696 (11) | 0.0698 (9) | 0.0154 (9) | −0.0273 (8) | −0.0095 (9) |
| C5 | 0.0606 (11) | 0.0567 (12) | 0.0640 (12) | 0.0060 (10) | −0.0101 (9) | 0.0000 (10) |
| O6 | 0.0825 (11) | 0.0763 (12) | 0.0789 (11) | 0.0279 (10) | −0.0197 (9) | −0.0097 (10) |
| O7 | 0.0836 (10) | 0.0574 (9) | 0.0752 (10) | 0.0154 (9) | −0.0315 (8) | −0.0076 (8) |
| C8 | 0.0580 (11) | 0.0486 (11) | 0.0606 (11) | 0.0064 (10) | −0.0114 (9) | −0.0040 (10) |
| C9 | 0.0622 (12) | 0.0593 (13) | 0.0620 (12) | −0.0034 (10) | 0.0017 (10) | 0.0043 (10) |
| C10 | 0.0471 (10) | 0.0536 (12) | 0.0692 (13) | −0.0050 (9) | −0.0031 (9) | 0.0011 (10) |
| C11 | 0.0582 (10) | 0.0476 (11) | 0.0591 (10) | −0.0055 (10) | −0.0061 (9) | −0.0034 (10) |
| C12 | 0.0619 (12) | 0.0590 (13) | 0.0678 (13) | −0.0138 (11) | 0.0067 (10) | −0.0041 (11) |
| C13 | 0.0500 (11) | 0.0548 (12) | 0.0813 (14) | −0.0100 (10) | −0.0071 (10) | −0.0116 (11) |
| O14 | 0.0940 (12) | 0.0949 (15) | 0.0596 (9) | −0.0340 (12) | −0.0141 (8) | 0.0015 (10) |
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