U11	U22	U33	U12	U13	U23
C1	0.046 (3)	0.044 (3)	0.045 (3)	0.000 (2)	0.012 (2)	0.003 (2)
C2	0.051 (3)	0.056 (3)	0.039 (2)	0.002 (3)	0.010 (2)	−0.004 (2)
C3	0.055 (3)	0.050 (3)	0.041 (3)	−0.002 (2)	0.006 (2)	−0.005 (2)
C4	0.043 (3)	0.047 (3)	0.048 (3)	0.003 (2)	0.009 (2)	0.000 (2)
C5	0.050 (3)	0.049 (3)	0.042 (2)	0.005 (2)	0.010 (2)	−0.001 (2)
C6	0.047 (3)	0.037 (3)	0.037 (2)	0.001 (2)	0.006 (2)	−0.003 (2)
C7	0.055 (3)	0.044 (3)	0.041 (2)	0.005 (3)	0.015 (2)	0.004 (2)
C8	0.045 (3)	0.037 (3)	0.046 (3)	−0.001 (2)	0.005 (2)	0.002 (2)
C9	0.057 (3)	0.041 (3)	0.046 (3)	0.005 (3)	0.004 (2)	0.000 (2)
C10	0.052 (3)	0.045 (3)	0.061 (3)	−0.005 (2)	0.008 (3)	0.000 (2)
C11	0.052 (3)	0.043 (3)	0.049 (3)	0.003 (2)	0.002 (2)	0.001 (2)
C12	0.058 (3)	0.052 (3)	0.045 (3)	0.005 (3)	0.017 (2)	−0.001 (2)
C13	0.053 (3)	0.055 (3)	0.044 (3)	−0.006 (3)	0.017 (2)	−0.003 (2)
C14	0.063 (3)	0.062 (4)	0.062 (3)	−0.003 (3)	0.018 (3)	−0.007 (3)
C15	0.063 (3)	0.089 (4)	0.054 (3)	−0.012 (3)	0.021 (3)	−0.018 (3)
Cl1	0.0730 (9)	0.0789 (10)	0.0548 (7)	−0.0040 (8)	0.0263 (7)	−0.0082 (7)
Cl2	0.0617 (8)	0.0510 (8)	0.0691 (8)	−0.0052 (7)	−0.0007 (7)	−0.0080 (7)
N1	0.053 (2)	0.046 (2)	0.039 (2)	0.003 (2)	0.0093 (19)	−0.0035 (18)
O1	0.061 (2)	0.063 (2)	0.0516 (19)	−0.0117 (18)	0.0160 (17)	−0.0102 (17)
O2	0.086 (3)	0.101 (3)	0.052 (2)	−0.028 (2)	0.023 (2)	−0.026 (2)