| U11 | U22 | U33 | U12 | U13 | U23 | |
| Cl1 | 0.0303 (2) | 0.01992 (19) | 0.0328 (2) | −0.00981 (15) | −0.00537 (15) | −0.00406 (15) |
| O1 | 0.0141 (5) | 0.0219 (5) | 0.0218 (5) | −0.0057 (4) | 0.0003 (4) | 0.0018 (4) |
| O2 | 0.0216 (5) | 0.0269 (6) | 0.0188 (5) | −0.0069 (4) | 0.0051 (4) | −0.0046 (4) |
| O3 | 0.0142 (5) | 0.0194 (5) | 0.0159 (5) | −0.0043 (4) | 0.0011 (4) | −0.0011 (4) |
| O4 | 0.0178 (5) | 0.0202 (5) | 0.0229 (5) | −0.0005 (4) | −0.0025 (4) | 0.0027 (4) |
| O5 | 0.0171 (5) | 0.0179 (5) | 0.0163 (5) | −0.0037 (4) | −0.0009 (4) | 0.0048 (4) |
| N1 | 0.0145 (6) | 0.0204 (6) | 0.0194 (6) | −0.0033 (5) | 0.0018 (5) | −0.0030 (5) |
| C1 | 0.0169 (7) | 0.0139 (6) | 0.0175 (6) | −0.0076 (5) | −0.0007 (5) | −0.0012 (5) |
| C2 | 0.0184 (7) | 0.0141 (6) | 0.0174 (7) | −0.0075 (5) | −0.0018 (5) | −0.0013 (5) |
| C3 | 0.0194 (7) | 0.0183 (7) | 0.0215 (7) | −0.0082 (6) | −0.0015 (5) | −0.0010 (6) |
| C4 | 0.0229 (7) | 0.0205 (7) | 0.0227 (7) | −0.0072 (6) | −0.0077 (6) | 0.0006 (6) |
| C5 | 0.0305 (8) | 0.0221 (7) | 0.0168 (7) | −0.0110 (6) | −0.0037 (6) | 0.0003 (6) |
| C6 | 0.0247 (8) | 0.0211 (7) | 0.0162 (7) | −0.0099 (6) | 0.0006 (5) | −0.0020 (6) |
| C7 | 0.0207 (7) | 0.0147 (6) | 0.0168 (6) | −0.0086 (5) | −0.0009 (5) | −0.0029 (5) |
| C8 | 0.0197 (7) | 0.0151 (6) | 0.0171 (6) | −0.0090 (5) | 0.0018 (5) | −0.0043 (5) |
| C9 | 0.0161 (7) | 0.0137 (6) | 0.0170 (6) | −0.0058 (5) | −0.0007 (5) | −0.0025 (5) |
| C10 | 0.0166 (7) | 0.0125 (6) | 0.0156 (6) | −0.0062 (5) | −0.0001 (5) | −0.0012 (5) |
| C11 | 0.0147 (6) | 0.0144 (6) | 0.0148 (6) | −0.0056 (5) | −0.0005 (5) | 0.0015 (5) |
| C12 | 0.0145 (6) | 0.0135 (6) | 0.0172 (6) | −0.0036 (5) | −0.0005 (5) | −0.0015 (5) |
| C13 | 0.0169 (7) | 0.0128 (6) | 0.0175 (6) | −0.0056 (5) | −0.0024 (5) | −0.0021 (5) |
| C14 | 0.0132 (6) | 0.0136 (6) | 0.0121 (6) | −0.0004 (5) | −0.0020 (5) | 0.0016 (5) |
| C15 | 0.0140 (6) | 0.0165 (7) | 0.0123 (6) | −0.0019 (5) | −0.0005 (5) | 0.0003 (5) |
| C16 | 0.0217 (7) | 0.0163 (7) | 0.0163 (6) | −0.0040 (6) | −0.0060 (5) | 0.0015 (5) |
| C17 | 0.0261 (8) | 0.0181 (7) | 0.0157 (7) | 0.0032 (6) | −0.0041 (5) | −0.0027 (5) |
| C18 | 0.0205 (7) | 0.0248 (8) | 0.0155 (7) | 0.0020 (6) | 0.0035 (5) | 0.0005 (6) |
| C19 | 0.0181 (7) | 0.0217 (7) | 0.0172 (7) | −0.0042 (6) | 0.0005 (5) | 0.0031 (5) |
| C20 | 0.0162 (7) | 0.0125 (6) | 0.0186 (7) | −0.0034 (5) | −0.0002 (5) | −0.0027 (5) |
| C21 | 0.0222 (7) | 0.0181 (7) | 0.0152 (6) | −0.0042 (6) | −0.0033 (5) | 0.0047 (5) |
| C22 | 0.0244 (8) | 0.0299 (8) | 0.0195 (7) | −0.0102 (6) | −0.0016 (6) | 0.0058 (6) |
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