U11	U22	U33	U12	U13	U23
Cl1	0.0203 (3)	0.0295 (3)	0.0223 (3)	−0.0046 (2)	−0.0012 (2)	−0.0031 (2)
Cl2	0.0264 (3)	0.0186 (3)	0.0248 (3)	−0.0065 (2)	0.0002 (2)	−0.0013 (2)
Cl3	0.0253 (3)	0.0289 (3)	0.0240 (3)	0.0017 (2)	0.0097 (2)	0.0008 (2)
O1	0.0284 (8)	0.0142 (7)	0.0295 (8)	0.0003 (6)	−0.0037 (7)	0.0008 (6)
C1	0.0165 (9)	0.0157 (10)	0.0181 (9)	−0.0002 (7)	0.0043 (8)	0.0014 (8)
C2	0.0156 (9)	0.0158 (10)	0.0188 (9)	0.0010 (7)	0.0054 (7)	0.0017 (8)
C3	0.0206 (10)	0.0152 (10)	0.0250 (10)	0.0018 (8)	0.0070 (8)	0.0012 (8)
C4	0.0207 (10)	0.0168 (9)	0.0240 (10)	−0.0026 (8)	0.0083 (8)	−0.0040 (8)
C5	0.0157 (9)	0.0225 (11)	0.0178 (9)	−0.0038 (8)	0.0035 (8)	−0.0020 (8)
C6	0.0176 (9)	0.0176 (10)	0.0190 (10)	0.0012 (8)	0.0043 (8)	0.0017 (8)
C7	0.0173 (9)	0.0169 (10)	0.0198 (10)	0.0005 (8)	0.0029 (8)	0.0006 (8)
C8	0.0190 (9)	0.0148 (9)	0.0186 (9)	−0.0027 (8)	0.0050 (8)	0.0006 (8)
C9	0.0174 (9)	0.0214 (10)	0.0203 (10)	−0.0007 (8)	0.0021 (8)	0.0012 (8)
C10	0.0208 (10)	0.0157 (10)	0.0215 (10)	0.0012 (8)	0.0018 (8)	0.0027 (8)