U11	U22	U33	U12	U13	U23
S1	0.0295 (3)	0.0577 (4)	0.0306 (3)	0.0117 (3)	0.0025 (2)	−0.0032 (4)
O1	0.0695 (15)	0.0584 (14)	0.0409 (12)	0.0304 (11)	0.0050 (10)	0.0040 (10)
O2	0.0254 (9)	0.0997 (17)	0.0418 (12)	0.0027 (10)	0.0028 (8)	−0.0118 (11)
O3	0.0545 (14)	0.0755 (17)	0.0822 (18)	0.0204 (13)	−0.0038 (12)	0.0157 (14)
O4	0.0300 (10)	0.0916 (18)	0.0829 (17)	0.0032 (14)	−0.0042 (10)	−0.0082 (17)
N1	0.0373 (12)	0.0503 (13)	0.0324 (13)	0.0042 (11)	0.0096 (10)	−0.0076 (11)
C1	0.0263 (11)	0.0461 (17)	0.0274 (12)	0.0045 (12)	0.0038 (9)	−0.0056 (12)
C2	0.0339 (14)	0.0466 (16)	0.0425 (16)	−0.0035 (13)	0.0058 (12)	−0.0041 (13)
C3	0.0458 (16)	0.0509 (18)	0.0387 (16)	0.0017 (14)	0.0101 (13)	0.0087 (14)
C4	0.0434 (16)	0.0590 (19)	0.0317 (15)	0.0069 (14)	0.0013 (12)	−0.0001 (14)
C5	0.0445 (17)	0.0542 (18)	0.0465 (19)	−0.0095 (14)	−0.0036 (14)	−0.0098 (15)
C6	0.0412 (14)	0.0438 (14)	0.0405 (16)	−0.0008 (14)	0.0041 (12)	0.0043 (14)
C7	0.0277 (11)	0.0397 (15)	0.0324 (12)	0.0074 (12)	0.0041 (9)	−0.0005 (13)
C8	0.0457 (16)	0.0482 (16)	0.0344 (16)	−0.0072 (13)	0.0034 (13)	−0.0014 (13)
C9	0.0510 (18)	0.066 (2)	0.0370 (17)	−0.0071 (16)	0.0034 (14)	−0.0084 (16)
C10	0.0566 (16)	0.070 (2)	0.0360 (15)	0.0064 (19)	0.0107 (13)	0.0054 (17)
C11	0.064 (2)	0.066 (2)	0.056 (2)	−0.0083 (18)	0.0258 (17)	0.0109 (18)
C12	0.0486 (16)	0.0516 (18)	0.0479 (19)	−0.0066 (15)	0.0100 (14)	−0.0056 (15)
C13	0.0289 (11)	0.0439 (15)	0.0343 (13)	0.0034 (13)	0.0030 (9)	−0.0071 (13)
C14	0.0400 (16)	0.065 (2)	0.0310 (15)	0.0090 (15)	0.0002 (12)	−0.0056 (15)