U11	U22	U33	U12	U13	U23
O1	0.0400 (15)	0.080 (2)	0.074 (2)	−0.0034 (15)	0.0022 (14)	−0.0451 (17)
O2	0.0407 (14)	0.0519 (16)	0.0495 (16)	−0.0001 (12)	0.0006 (12)	−0.0191 (13)
O3	0.0462 (15)	0.0593 (18)	0.0468 (18)	−0.0065 (13)	0.0135 (14)	−0.0159 (13)
O4	0.0369 (14)	0.0573 (17)	0.071 (2)	−0.0031 (13)	0.0078 (13)	−0.0341 (15)
O5	0.0377 (14)	0.0478 (15)	0.0467 (16)	−0.0061 (12)	0.0049 (12)	−0.0142 (13)
O6	0.0397 (14)	0.0440 (15)	0.0536 (18)	0.0009 (12)	0.0090 (13)	−0.0072 (13)
C1	0.043 (2)	0.067 (3)	0.060 (3)	−0.002 (2)	0.000 (2)	−0.034 (2)
C2	0.090 (3)	0.047 (3)	0.043 (3)	0.003 (2)	−0.005 (2)	−0.002 (2)
C3	0.098 (3)	0.039 (2)	0.054 (3)	−0.014 (2)	0.027 (3)	−0.012 (2)
C4	0.043 (2)	0.052 (2)	0.053 (3)	−0.0016 (19)	0.0120 (19)	−0.022 (2)
C5	0.073 (3)	0.052 (2)	0.048 (3)	−0.011 (2)	0.006 (2)	0.003 (2)
C6	0.086 (3)	0.057 (3)	0.048 (3)	−0.028 (2)	0.022 (2)	−0.009 (2)
C7	0.050 (2)	0.045 (2)	0.035 (2)	0.001 (2)	0.000 (2)	−0.0070 (19)
C8	0.041 (2)	0.041 (2)	0.035 (2)	−0.0049 (17)	−0.0024 (17)	−0.0031 (17)
C9	0.065 (3)	0.052 (3)	0.045 (3)	−0.007 (2)	0.003 (2)	0.001 (2)
C10	0.048 (2)	0.051 (2)	0.040 (2)	−0.0012 (19)	0.0032 (18)	0.0025 (19)
C11	0.055 (2)	0.057 (3)	0.048 (3)	0.003 (2)	0.001 (2)	−0.015 (2)
C12	0.039 (2)	0.042 (2)	0.034 (2)	−0.0034 (19)	0.0052 (18)	0.0001 (18)
C13	0.038 (2)	0.039 (2)	0.035 (2)	−0.0065 (17)	0.0003 (17)	−0.0009 (17)
C14	0.060 (2)	0.044 (2)	0.043 (2)	−0.006 (2)	0.0008 (19)	0.0045 (19)
C15	0.045 (2)	0.042 (2)	0.043 (2)	−0.0025 (18)	0.0069 (18)	−0.0016 (18)
C16	0.052 (2)	0.051 (2)	0.043 (2)	−0.010 (2)	0.0044 (19)	−0.0085 (19)