| U11 | U22 | U33 | U12 | U13 | U23 | |
| Cl1 | 0.01532 (7) | 0.02794 (10) | 0.02141 (8) | −0.00307 (5) | 0.00332 (5) | 0.00537 (6) |
| O1 | 0.0226 (3) | 0.0312 (3) | 0.0242 (3) | 0.0004 (2) | 0.0103 (2) | −0.0010 (2) |
| N1 | 0.0162 (2) | 0.0145 (2) | 0.0153 (2) | 0.00089 (17) | −0.00179 (17) | 0.00089 (17) |
| C1 | 0.0122 (2) | 0.0158 (2) | 0.0145 (2) | 0.00001 (19) | 0.00039 (18) | 0.00054 (19) |
| C2 | 0.0132 (2) | 0.0166 (3) | 0.0167 (2) | −0.00137 (19) | 0.00138 (19) | 0.0000 (2) |
| C3 | 0.0123 (2) | 0.0174 (3) | 0.0219 (3) | −0.0004 (2) | −0.0010 (2) | −0.0008 (2) |
| C4 | 0.0133 (2) | 0.0153 (3) | 0.0197 (3) | 0.00069 (19) | −0.0032 (2) | −0.0008 (2) |
| C5 | 0.0136 (2) | 0.0125 (2) | 0.0143 (2) | 0.00098 (18) | −0.00177 (18) | −0.00102 (18) |
| C6 | 0.0118 (2) | 0.0130 (2) | 0.0125 (2) | 0.00046 (18) | −0.00022 (17) | −0.00075 (18) |
| C7 | 0.0121 (2) | 0.0135 (2) | 0.0115 (2) | 0.00065 (17) | 0.00041 (17) | −0.00052 (18) |
| C8 | 0.0136 (2) | 0.0143 (2) | 0.0122 (2) | 0.00014 (18) | 0.00090 (18) | −0.00009 (18) |
| C9 | 0.0168 (2) | 0.0135 (2) | 0.0136 (2) | 0.00065 (19) | −0.00055 (19) | 0.00067 (19) |
| C10 | 0.0108 (2) | 0.0151 (2) | 0.0119 (2) | −0.00022 (18) | 0.00032 (17) | 0.00094 (18) |
| C11 | 0.0140 (2) | 0.0181 (3) | 0.0127 (2) | 0.0014 (2) | 0.00037 (18) | −0.0009 (2) |
| C12 | 0.0151 (2) | 0.0200 (3) | 0.0132 (2) | −0.0002 (2) | −0.00113 (19) | 0.0002 (2) |
| C13 | 0.0127 (2) | 0.0181 (3) | 0.0164 (2) | −0.00090 (19) | −0.00199 (19) | 0.0024 (2) |
| C14 | 0.0116 (2) | 0.0171 (3) | 0.0176 (3) | 0.00086 (19) | 0.00059 (19) | 0.0011 (2) |
| C15 | 0.0122 (2) | 0.0171 (3) | 0.0136 (2) | 0.00082 (19) | 0.00122 (18) | −0.00023 (19) |
| C16 | 0.0232 (3) | 0.0199 (3) | 0.0177 (3) | 0.0000 (2) | 0.0000 (2) | 0.0065 (2) |
| C17 | 0.0150 (2) | 0.0194 (3) | 0.0150 (2) | −0.0010 (2) | 0.00195 (19) | 0.0031 (2) |
| C18 | 0.0256 (4) | 0.0377 (5) | 0.0222 (3) | −0.0151 (3) | 0.0014 (3) | −0.0032 (3) |