U11	U22	U33	U12	U13	U23
O1	0.0539 (11)	0.1108 (18)	0.0780 (13)	0.0078 (11)	0.0130 (9)	0.0395 (13)
O2	0.0390 (8)	0.0609 (11)	0.0510 (9)	0.0101 (7)	0.0086 (7)	0.0066 (8)
O3	0.0503 (10)	0.0774 (13)	0.0557 (10)	0.0091 (9)	0.0136 (8)	−0.0205 (10)
O4	0.0387 (8)	0.0522 (10)	0.0487 (9)	0.0046 (7)	0.0056 (6)	−0.0073 (8)
N1	0.0432 (10)	0.0431 (11)	0.0428 (10)	0.0031 (9)	0.0060 (8)	−0.0049 (9)
C1	0.0478 (14)	0.0644 (18)	0.0793 (17)	0.0082 (13)	0.0195 (12)	−0.0008 (15)
C2	0.0418 (12)	0.0538 (16)	0.0533 (13)	−0.0003 (11)	0.0075 (10)	−0.0007 (12)
C3	0.0369 (11)	0.0450 (13)	0.0460 (12)	0.0036 (10)	0.0069 (9)	0.0089 (11)
C4	0.0455 (12)	0.0452 (14)	0.0442 (12)	0.0020 (11)	0.0088 (9)	−0.0014 (11)
C5	0.0412 (11)	0.0422 (13)	0.0401 (11)	−0.0019 (10)	0.0034 (9)	−0.0006 (10)
C6	0.0407 (11)	0.0385 (13)	0.0380 (10)	−0.0005 (9)	0.0085 (9)	0.0045 (10)
C7	0.0442 (12)	0.0521 (14)	0.0400 (11)	0.0002 (11)	0.0070 (9)	−0.0052 (11)
C8	0.0397 (12)	0.0605 (16)	0.0423 (12)	−0.0009 (11)	0.0017 (9)	−0.0023 (11)
C9	0.0419 (11)	0.0411 (13)	0.0400 (11)	−0.0015 (10)	0.0096 (9)	−0.0022 (10)
C10	0.0402 (11)	0.0386 (13)	0.0410 (11)	0.0010 (10)	0.0088 (9)	−0.0017 (10)
C11	0.0410 (11)	0.0472 (14)	0.0430 (11)	−0.0009 (10)	0.0078 (9)	−0.0021 (11)
C12	0.0420 (12)	0.0377 (12)	0.0441 (11)	0.0013 (10)	0.0088 (9)	−0.0023 (10)
C13	0.0534 (13)	0.0385 (13)	0.0414 (11)	−0.0013 (10)	0.0019 (9)	0.0027 (10)
C14	0.0571 (15)	0.0563 (16)	0.0531 (14)	0.0004 (12)	−0.0033 (11)	0.0013 (13)
C15	0.0656 (16)	0.0642 (19)	0.0689 (17)	−0.0058 (15)	−0.0158 (14)	0.0039 (15)
C16	0.100 (2)	0.0493 (17)	0.0513 (15)	−0.0104 (16)	−0.0120 (15)	−0.0002 (13)
C17	0.095 (2)	0.0578 (18)	0.0476 (14)	0.0008 (15)	0.0035 (14)	−0.0093 (13)
C18	0.0656 (16)	0.0528 (16)	0.0512 (14)	0.0007 (13)	0.0065 (11)	−0.0057 (12)