U11	U22	U33	U12	U13	U23
C1	0.0389 (6)	0.0433 (6)	0.0313 (6)	−0.0140 (5)	−0.0066 (4)	0.0011 (4)
C2	0.0413 (6)	0.0410 (6)	0.0317 (6)	−0.0135 (5)	−0.0066 (4)	0.0011 (4)
C3	0.0439 (7)	0.0559 (7)	0.0406 (7)	−0.0189 (6)	−0.0031 (5)	−0.0016 (5)
C4	0.0526 (7)	0.0592 (8)	0.0396 (7)	−0.0161 (6)	0.0039 (6)	−0.0019 (6)
C5	0.0656 (8)	0.0568 (8)	0.0317 (7)	−0.0106 (6)	−0.0064 (6)	−0.0048 (5)
C6	0.0545 (8)	0.0564 (8)	0.0388 (7)	−0.0113 (6)	−0.0162 (6)	−0.0043 (5)
C7	0.0415 (6)	0.0427 (6)	0.0354 (6)	−0.0106 (5)	−0.0097 (5)	−0.0003 (5)
C8	0.0366 (6)	0.0476 (6)	0.0391 (6)	−0.0127 (5)	−0.0083 (5)	−0.0005 (5)
C9	0.0394 (6)	0.0745 (9)	0.0505 (8)	−0.0210 (6)	−0.0050 (5)	−0.0066 (6)
C10	0.0446 (6)	0.0629 (8)	0.0351 (6)	−0.0211 (6)	−0.0079 (5)	−0.0038 (5)
C11	0.0608 (8)	0.0600 (8)	0.0381 (7)	−0.0217 (6)	−0.0093 (6)	−0.0066 (5)
C12	0.0842 (11)	0.0549 (8)	0.0358 (7)	−0.0028 (8)	−0.0139 (7)	−0.0097 (6)
C13	0.0972 (13)	0.0874 (12)	0.0545 (10)	−0.0363 (10)	0.0076 (9)	0.0021 (8)
C14	0.0723 (10)	0.0929 (11)	0.0440 (8)	−0.0373 (9)	−0.0061 (7)	0.0036 (7)
N1	0.0385 (5)	0.0515 (6)	0.0331 (5)	−0.0169 (4)	−0.0062 (4)	−0.0017 (4)
N2	0.0400 (5)	0.0571 (6)	0.0425 (6)	−0.0140 (5)	−0.0120 (4)	−0.0036 (5)
N3	0.0602 (7)	0.0644 (7)	0.0316 (5)	−0.0157 (5)	−0.0071 (5)	−0.0024 (5)
O1	0.0409 (4)	0.0667 (6)	0.0316 (4)	−0.0203 (4)	−0.0035 (3)	−0.0063 (4)
O2	0.1019 (9)	0.0914 (9)	0.0633 (8)	−0.0034 (7)	−0.0421 (7)	−0.0077 (6)
O3	0.1211 (10)	0.0797 (8)	0.0399 (6)	−0.0288 (7)	−0.0081 (6)	0.0096 (5)