| U11 | U22 | U33 | U12 | U13 | U23 | |
| Cl1 | 0.01521 (10) | 0.01761 (10) | 0.02749 (11) | 0.00551 (7) | 0.00402 (7) | −0.00306 (8) |
| O1 | 0.0153 (3) | 0.0210 (3) | 0.0279 (4) | 0.0044 (2) | −0.0042 (2) | 0.0044 (3) |
| N1 | 0.0142 (3) | 0.0112 (3) | 0.0124 (3) | 0.0017 (2) | 0.0016 (2) | 0.0031 (2) |
| C1 | 0.0126 (3) | 0.0116 (3) | 0.0126 (3) | 0.0015 (2) | 0.0012 (2) | 0.0020 (2) |
| C2 | 0.0132 (3) | 0.0103 (3) | 0.0118 (3) | 0.0020 (2) | −0.0002 (2) | 0.0013 (2) |
| C3 | 0.0180 (3) | 0.0117 (3) | 0.0140 (3) | 0.0042 (3) | −0.0018 (3) | 0.0020 (2) |
| C4 | 0.0176 (4) | 0.0132 (3) | 0.0166 (3) | 0.0058 (3) | −0.0025 (3) | 0.0003 (3) |
| C5 | 0.0129 (3) | 0.0133 (3) | 0.0170 (3) | 0.0039 (2) | −0.0002 (3) | −0.0016 (3) |
| C6 | 0.0128 (3) | 0.0118 (3) | 0.0146 (3) | 0.0025 (2) | 0.0011 (2) | 0.0005 (2) |
| C7 | 0.0116 (3) | 0.0100 (3) | 0.0119 (3) | 0.0021 (2) | 0.0001 (2) | 0.0011 (2) |
| C8 | 0.0113 (3) | 0.0095 (3) | 0.0116 (3) | 0.0012 (2) | 0.0002 (2) | 0.0018 (2) |
| C9 | 0.0116 (3) | 0.0108 (3) | 0.0122 (3) | 0.0020 (2) | 0.0011 (2) | 0.0024 (2) |
| C10 | 0.0122 (3) | 0.0104 (3) | 0.0116 (3) | 0.0023 (2) | 0.0016 (2) | 0.0025 (2) |
| C11 | 0.0155 (3) | 0.0150 (3) | 0.0133 (3) | 0.0014 (3) | −0.0009 (2) | 0.0024 (3) |
| C12 | 0.0191 (4) | 0.0187 (4) | 0.0126 (3) | 0.0050 (3) | 0.0013 (3) | 0.0038 (3) |
| C13 | 0.0195 (4) | 0.0149 (3) | 0.0159 (3) | 0.0057 (3) | 0.0063 (3) | 0.0054 (3) |
| C14 | 0.0170 (4) | 0.0140 (3) | 0.0180 (3) | −0.0002 (3) | 0.0045 (3) | 0.0033 (3) |
| C15 | 0.0143 (3) | 0.0141 (3) | 0.0144 (3) | −0.0002 (3) | 0.0010 (2) | 0.0022 (2) |
| C16 | 0.0132 (3) | 0.0136 (3) | 0.0146 (3) | 0.0042 (2) | 0.0033 (2) | 0.0042 (2) |
| C17 | 0.0308 (5) | 0.0161 (4) | 0.0229 (4) | 0.0101 (3) | −0.0037 (4) | −0.0030 (3) |
| C18 | 0.0164 (4) | 0.0185 (4) | 0.0171 (3) | 0.0039 (3) | 0.0060 (3) | 0.0045 (3) |
| Cl2 | 0.01584 (9) | 0.01583 (9) | 0.01397 (9) | 0.00038 (6) | −0.00013 (6) | 0.00351 (6) |
| O2 | 0.0187 (3) | 0.0142 (3) | 0.0297 (4) | 0.0028 (2) | −0.0018 (3) | 0.0094 (2) |
| O3 | 0.0148 (3) | 0.0220 (3) | 0.0209 (3) | −0.0037 (2) | −0.0018 (2) | 0.0106 (2) |
| O4 | 0.0200 (3) | 0.0196 (3) | 0.0181 (3) | 0.0001 (2) | −0.0077 (2) | 0.0070 (2) |
| O5 | 0.0264 (4) | 0.0343 (4) | 0.0192 (3) | 0.0083 (3) | 0.0016 (3) | −0.0065 (3) |