U11	U22	U33	U12	U13	U23
S	0.0692 (9)	0.0539 (9)	0.0446 (8)	−0.0107 (9)	0.0018 (7)	−0.0062 (8)
Cl	0.0678 (10)	0.0855 (12)	0.0761 (11)	0.0157 (9)	−0.0087 (8)	−0.0023 (9)
O1	0.101 (3)	0.097 (3)	0.041 (2)	−0.019 (3)	−0.020 (2)	0.006 (2)
O2	0.083 (3)	0.052 (3)	0.084 (3)	−0.002 (2)	0.021 (2)	−0.017 (2)
O4	0.087 (3)	0.059 (3)	0.076 (3)	0.005 (2)	−0.023 (3)	0.005 (2)
O5	0.075 (3)	0.036 (2)	0.077 (3)	0.004 (2)	−0.006 (2)	0.004 (2)
N	0.069 (3)	0.057 (3)	0.049 (3)	−0.013 (3)	0.005 (2)	0.009 (2)
C1	0.091 (5)	0.192 (9)	0.058 (4)	−0.041 (6)	0.012 (4)	−0.015 (5)
C2	0.053 (4)	0.107 (6)	0.045 (3)	−0.020 (4)	−0.010 (3)	0.001 (4)
C3	0.089 (5)	0.080 (5)	0.074 (5)	−0.023 (4)	0.005 (4)	0.029 (4)
C4	0.075 (5)	0.049 (4)	0.073 (4)	−0.002 (3)	0.002 (4)	0.013 (3)
C5	0.053 (3)	0.052 (3)	0.043 (3)	−0.006 (3)	−0.006 (2)	−0.005 (3)
C6	0.080 (4)	0.056 (4)	0.053 (4)	−0.003 (3)	0.006 (3)	−0.001 (3)
C7	0.070 (4)	0.089 (5)	0.064 (4)	0.008 (4)	−0.001 (4)	−0.019 (4)
C8	0.055 (4)	0.051 (3)	0.047 (3)	−0.002 (3)	0.007 (3)	−0.008 (3)
C9	0.079 (4)	0.035 (3)	0.075 (4)	0.010 (3)	0.010 (4)	0.008 (3)
C10	0.058 (4)	0.037 (3)	0.068 (4)	0.008 (3)	0.003 (3)	0.007 (3)
C11	0.052 (3)	0.058 (4)	0.049 (3)	0.007 (3)	0.002 (3)	0.008 (3)
C12	0.052 (3)	0.055 (4)	0.058 (3)	−0.005 (3)	0.012 (3)	0.002 (3)
C13	0.054 (3)	0.037 (3)	0.044 (3)	0.001 (3)	0.008 (3)	0.004 (2)
C14	0.068 (4)	0.040 (3)	0.053 (4)	−0.001 (3)	0.011 (3)	0.003 (3)
C15	0.132 (6)	0.032 (4)	0.100 (5)	0.023 (4)	0.019 (5)	0.020 (3)