U11	U22	U33	U12	U13	U23
Cl1	0.0478 (2)	0.02692 (19)	0.0405 (2)	0.00367 (16)	0.00954 (17)	0.00623 (15)
Cl2	0.03272 (19)	0.0378 (2)	0.0399 (2)	−0.00243 (15)	0.00277 (15)	0.01388 (16)
O1	0.0530 (7)	0.0320 (6)	0.0225 (5)	−0.0099 (5)	0.0088 (5)	0.0033 (4)
O2	0.0526 (7)	0.0255 (5)	0.0402 (7)	−0.0026 (5)	0.0013 (5)	0.0067 (5)
N1	0.0302 (6)	0.0239 (6)	0.0174 (5)	−0.0030 (4)	0.0079 (5)	−0.0014 (4)
N2	0.0253 (5)	0.0229 (5)	0.0214 (5)	0.0000 (4)	0.0077 (4)	−0.0026 (4)
C1	0.0309 (7)	0.0255 (7)	0.0350 (8)	0.0002 (5)	0.0097 (6)	0.0000 (6)
C2	0.0373 (8)	0.0269 (7)	0.0494 (9)	−0.0047 (6)	0.0130 (7)	−0.0102 (7)
C3	0.0394 (8)	0.0431 (9)	0.0382 (9)	−0.0097 (7)	0.0104 (7)	−0.0166 (7)
C4	0.0375 (8)	0.0470 (9)	0.0261 (7)	−0.0070 (7)	0.0088 (6)	−0.0059 (6)
C5	0.0273 (7)	0.0315 (7)	0.0257 (7)	−0.0033 (5)	0.0092 (6)	−0.0009 (5)
C6	0.0237 (6)	0.0254 (7)	0.0249 (7)	−0.0003 (5)	0.0084 (5)	−0.0026 (5)
C7	0.0269 (7)	0.0229 (6)	0.0232 (7)	0.0022 (5)	0.0076 (5)	0.0011 (5)
C8	0.0274 (7)	0.0229 (6)	0.0225 (7)	0.0012 (5)	0.0087 (5)	0.0011 (5)
C9	0.0272 (6)	0.0257 (7)	0.0250 (7)	−0.0032 (5)	0.0118 (5)	−0.0010 (5)
C10	0.0310 (7)	0.0272 (7)	0.0305 (7)	−0.0025 (6)	0.0142 (6)	−0.0012 (5)
C11	0.0469 (9)	0.0279 (7)	0.0450 (9)	−0.0067 (6)	0.0238 (8)	−0.0096 (7)
C12	0.0539 (10)	0.0437 (10)	0.0386 (9)	−0.0164 (8)	0.0214 (8)	−0.0176 (7)
C13	0.0431 (9)	0.0520 (10)	0.0255 (7)	−0.0143 (8)	0.0102 (7)	−0.0048 (7)
C14	0.0299 (7)	0.0324 (7)	0.0279 (7)	−0.0058 (6)	0.0114 (6)	0.0022 (6)