U11	U22	U33	U12	U13	U23
O1	0.0154 (6)	0.0215 (7)	0.0235 (7)	−0.0012 (6)	−0.0020 (5)	−0.0019 (6)
O2	0.0194 (6)	0.0162 (7)	0.0184 (6)	−0.0047 (5)	0.0000 (5)	0.0010 (5)
O3	0.0326 (8)	0.0219 (8)	0.0221 (7)	−0.0020 (6)	−0.0116 (6)	0.0034 (6)
C1	0.0173 (9)	0.0132 (9)	0.0210 (9)	−0.0003 (7)	−0.0024 (7)	0.0013 (7)
C2	0.0195 (9)	0.0148 (9)	0.0245 (10)	−0.0037 (7)	−0.0004 (7)	0.0005 (7)
C3	0.0129 (8)	0.0196 (9)	0.0172 (8)	−0.0006 (8)	−0.0015 (6)	−0.0029 (8)
C4	0.0178 (9)	0.0166 (9)	0.0135 (8)	0.0014 (7)	0.0009 (6)	−0.0031 (7)
C5	0.0152 (8)	0.0135 (9)	0.0157 (8)	−0.0008 (7)	0.0002 (6)	−0.0001 (7)
C6	0.0190 (9)	0.0149 (9)	0.0181 (9)	−0.0007 (7)	−0.0007 (7)	0.0046 (7)
C7	0.0180 (9)	0.0169 (9)	0.0174 (9)	−0.0043 (7)	−0.0002 (7)	0.0034 (7)
C8	0.0156 (8)	0.0135 (8)	0.0154 (8)	−0.0015 (7)	0.0008 (6)	0.0010 (7)
C9	0.0145 (8)	0.0129 (8)	0.0148 (9)	−0.0011 (7)	0.0007 (6)	−0.0016 (7)
C10	0.0156 (8)	0.0123 (8)	0.0154 (9)	−0.0008 (7)	−0.0009 (7)	0.0012 (7)
C11	0.0181 (9)	0.0138 (8)	0.0204 (9)	−0.0018 (8)	−0.0016 (7)	0.0021 (8)
C12	0.0204 (9)	0.0207 (10)	0.0152 (9)	−0.0047 (8)	−0.0016 (7)	0.0031 (8)
C13	0.0187 (9)	0.0160 (9)	0.0135 (8)	−0.0038 (7)	0.0007 (7)	−0.0025 (7)
C14	0.0170 (9)	0.0132 (8)	0.0199 (9)	−0.0024 (7)	0.0018 (7)	−0.0026 (7)
C15	0.0164 (8)	0.0181 (9)	0.0155 (8)	−0.0021 (7)	0.0014 (6)	−0.0003 (7)
C16	0.0168 (9)	0.0133 (9)	0.0176 (9)	−0.0038 (7)	−0.0011 (7)	−0.0005 (7)
C17	0.0199 (9)	0.0204 (10)	0.0189 (9)	−0.0016 (8)	−0.0030 (7)	−0.0015 (8)
C18	0.0207 (9)	0.0206 (10)	0.0190 (9)	0.0023 (8)	−0.0006 (7)	−0.0002 (8)
C19	0.0182 (9)	0.0253 (10)	0.0201 (9)	0.0035 (8)	−0.0024 (7)	0.0001 (8)
C20	0.0167 (8)	0.0204 (9)	0.0171 (9)	−0.0037 (8)	0.0007 (7)	0.0000 (8)
C21	0.0212 (9)	0.0271 (11)	0.0215 (10)	−0.0078 (8)	0.0002 (7)	0.0039 (8)