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. Author manuscript; available in PMC: 2012 Feb 1.
Published in final edited form as: Micron. 2010 Sep 9;42(2):196–206. doi: 10.1016/j.micron.2010.08.011

Figure 1.

Figure 1

Schematic explaining the principles of AFM operation. The position of the tip relative to the sample is controlled by a piezoelectric scanner. The vertical displacement of the tip during scanning is detected using the optical lever principle, in which the position of the light spot on the PSPD is measured.