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. Author manuscript; available in PMC: 2010 Dec 16.
Published in final edited form as: J Microelectromech Syst. 2010 Dec 1;19(6):1341–1351. doi: 10.1109/JMEMS.2010.2076786

TABLE IV.

Coating Effect of the CMUTs for Imaging

No coating 150-μm coating Coating effect
Experiment Experiment Modeling
fcenter 8.9 MHz 9.3 MHz 5%
9.4 MHz 6%

FBW 81% 64% −21%
70% −14%