U11	U22	U33	U12	U13	U23
Cl1	0.0275 (2)	0.0300 (2)	0.0343 (3)	0.00316 (18)	−0.00924 (18)	0.00382 (19)
S1	0.0321 (2)	0.0347 (3)	0.0234 (2)	0.01932 (19)	0.01270 (17)	0.01826 (19)
O1	0.0315 (7)	0.0388 (7)	0.0274 (6)	0.0197 (6)	0.0153 (5)	0.0201 (6)
N1	0.0235 (7)	0.0238 (7)	0.0197 (7)	0.0131 (6)	0.0087 (6)	0.0103 (6)
N2	0.0253 (7)	0.0261 (7)	0.0240 (7)	0.0137 (6)	0.0106 (6)	0.0158 (6)
C1	0.0195 (8)	0.0234 (8)	0.0171 (8)	0.0041 (6)	0.0018 (6)	0.0077 (7)
C2	0.0319 (9)	0.0219 (8)	0.0223 (8)	0.0115 (7)	0.0074 (7)	0.0086 (7)
C3	0.0250 (9)	0.0334 (9)	0.0304 (9)	0.0158 (7)	0.0087 (7)	0.0176 (8)
C4	0.0183 (8)	0.0344 (9)	0.0298 (9)	0.0058 (7)	0.0004 (7)	0.0175 (8)
C5	0.0233 (8)	0.0213 (8)	0.0228 (8)	0.0030 (7)	0.0018 (6)	0.0095 (7)
C6	0.0194 (8)	0.0211 (8)	0.0171 (8)	0.0062 (6)	0.0062 (6)	0.0103 (7)
C7	0.0193 (8)	0.0198 (8)	0.0187 (8)	0.0041 (6)	0.0027 (6)	0.0080 (7)
C8	0.0200 (8)	0.0195 (8)	0.0189 (8)	0.0065 (6)	0.0025 (6)	0.0066 (7)
C9	0.0302 (9)	0.0292 (9)	0.0269 (9)	0.0174 (7)	0.0105 (7)	0.0157 (8)
C10	0.0223 (8)	0.0159 (7)	0.0248 (8)	0.0066 (6)	0.0066 (6)	0.0095 (7)
C11	0.0216 (8)	0.0228 (8)	0.0262 (9)	0.0071 (7)	0.0036 (6)	0.0108 (7)
C12	0.0308 (9)	0.0222 (8)	0.0226 (8)	0.0061 (7)	0.0059 (7)	0.0082 (7)
C13	0.0293 (9)	0.0228 (9)	0.0325 (10)	0.0089 (7)	0.0150 (7)	0.0094 (8)
C14	0.0207 (9)	0.0278 (9)	0.0393 (10)	0.0115 (7)	0.0066 (7)	0.0114 (8)
C15	0.0259 (9)	0.0256 (8)	0.0259 (9)	0.0109 (7)	0.0029 (7)	0.0101 (7)