U11	U22	U33	U12	U13	U23
O1	0.0190 (4)	0.0167 (4)	0.0230 (4)	0.0009 (3)	0.0060 (3)	0.0034 (3)
O2	0.0217 (4)	0.0182 (4)	0.0269 (4)	0.0041 (3)	0.0112 (3)	0.0044 (3)
O3	0.0333 (5)	0.0184 (4)	0.0463 (6)	0.0023 (4)	0.0273 (4)	0.0066 (4)
N1	0.0171 (4)	0.0173 (5)	0.0208 (5)	0.0008 (4)	0.0060 (4)	0.0036 (4)
N2	0.0183 (4)	0.0165 (5)	0.0216 (5)	0.0006 (4)	0.0057 (4)	0.0036 (4)
N3	0.0178 (4)	0.0192 (5)	0.0192 (5)	−0.0019 (4)	0.0062 (4)	−0.0020 (4)
C1	0.0170 (5)	0.0173 (5)	0.0228 (6)	−0.0038 (4)	0.0071 (4)	−0.0013 (5)
C2	0.0188 (5)	0.0214 (6)	0.0208 (6)	−0.0040 (4)	0.0060 (4)	−0.0001 (5)
C3	0.0176 (5)	0.0232 (6)	0.0293 (6)	−0.0018 (5)	0.0071 (5)	−0.0010 (5)
C4	0.0241 (6)	0.0237 (6)	0.0319 (7)	−0.0058 (5)	0.0147 (5)	−0.0083 (5)
C5	0.0302 (6)	0.0271 (7)	0.0212 (6)	−0.0061 (5)	0.0097 (5)	−0.0051 (5)
C6	0.0220 (6)	0.0236 (6)	0.0211 (6)	−0.0021 (5)	0.0039 (5)	−0.0013 (5)
C7	0.0164 (5)	0.0169 (5)	0.0167 (5)	−0.0032 (4)	0.0038 (4)	−0.0016 (4)
C8	0.0163 (5)	0.0172 (5)	0.0174 (5)	−0.0008 (4)	0.0042 (4)	−0.0013 (4)
C9	0.0169 (5)	0.0179 (5)	0.0170 (5)	−0.0012 (4)	0.0030 (4)	−0.0019 (4)
C10	0.0232 (6)	0.0190 (6)	0.0258 (6)	0.0036 (5)	0.0064 (5)	0.0027 (5)
C11	0.0249 (6)	0.0185 (6)	0.0251 (6)	−0.0033 (5)	0.0096 (5)	0.0031 (5)
C12	0.0184 (5)	0.0198 (6)	0.0189 (5)	0.0007 (4)	0.0060 (4)	−0.0012 (4)
C13	0.0207 (5)	0.0190 (6)	0.0171 (5)	−0.0008 (4)	0.0070 (4)	−0.0022 (4)
C14	0.0219 (5)	0.0160 (5)	0.0170 (5)	−0.0006 (4)	0.0069 (4)	0.0001 (4)
C15	0.0206 (5)	0.0161 (5)	0.0192 (5)	0.0017 (4)	0.0069 (4)	−0.0019 (4)
C16	0.0250 (6)	0.0184 (6)	0.0253 (6)	−0.0005 (5)	0.0149 (5)	−0.0008 (5)
C17	0.0325 (6)	0.0166 (6)	0.0284 (6)	0.0030 (5)	0.0169 (5)	0.0034 (5)
C18	0.0256 (6)	0.0191 (6)	0.0241 (6)	0.0046 (5)	0.0113 (5)	0.0006 (5)
C19	0.0246 (6)	0.0176 (6)	0.0273 (6)	0.0028 (5)	0.0095 (5)	0.0041 (5)
C20	0.0552 (9)	0.0222 (7)	0.0797 (12)	0.0092 (7)	0.0513 (9)	0.0175 (7)