| U11 | U22 | U33 | U12 | U13 | U23 | |
| Cl1 | 0.0842 (6) | 0.0557 (5) | 0.0649 (5) | −0.0032 (5) | −0.0152 (5) | 0.0061 (5) |
| O1 | 0.0462 (11) | 0.0691 (15) | 0.0693 (14) | −0.0068 (10) | 0.0032 (12) | −0.0023 (13) |
| O4 | 0.0470 (12) | 0.0637 (14) | 0.0632 (14) | 0.0053 (11) | −0.0018 (11) | 0.0033 (11) |
| O5 | 0.0686 (15) | 0.0762 (17) | 0.0535 (14) | −0.0004 (14) | −0.0026 (13) | −0.0064 (12) |
| O2 | 0.0706 (15) | 0.0653 (14) | 0.0533 (13) | 0.0008 (12) | 0.0002 (12) | 0.0075 (12) |
| O3 | 0.0718 (15) | 0.0691 (15) | 0.0569 (15) | 0.0070 (13) | 0.0017 (13) | 0.0003 (13) |
| O6 | 0.0656 (15) | 0.0867 (19) | 0.0535 (14) | −0.0118 (14) | 0.0089 (13) | −0.0105 (13) |
| C6 | 0.0490 (19) | 0.068 (2) | 0.083 (3) | 0.0046 (17) | −0.005 (2) | 0.007 (2) |
| C12 | 0.0472 (18) | 0.073 (2) | 0.087 (3) | −0.0077 (17) | −0.015 (2) | 0.000 (2) |
| C5 | 0.059 (2) | 0.061 (2) | 0.076 (2) | 0.0041 (18) | −0.011 (2) | 0.0118 (19) |
| C7 | 0.0488 (19) | 0.089 (3) | 0.081 (3) | −0.0001 (19) | 0.019 (2) | −0.014 (2) |
| C11 | 0.061 (2) | 0.072 (2) | 0.071 (2) | −0.0045 (19) | −0.013 (2) | −0.0100 (19) |
| C3 | 0.092 (3) | 0.087 (3) | 0.0432 (19) | 0.016 (2) | −0.003 (2) | −0.0128 (18) |
| C2 | 0.089 (3) | 0.079 (3) | 0.054 (2) | 0.012 (2) | 0.018 (2) | 0.008 (2) |
| C4 | 0.087 (2) | 0.090 (3) | 0.046 (2) | −0.002 (2) | −0.005 (2) | 0.001 (2) |
| C10 | 0.083 (2) | 0.095 (3) | 0.049 (2) | −0.008 (2) | −0.008 (2) | −0.008 (2) |
| C9 | 0.105 (3) | 0.095 (3) | 0.047 (2) | −0.015 (3) | 0.004 (2) | 0.0011 (19) |
| C1 | 0.058 (2) | 0.073 (3) | 0.078 (3) | 0.0017 (19) | 0.017 (2) | 0.006 (2) |
| C8 | 0.081 (3) | 0.093 (3) | 0.071 (3) | −0.011 (3) | 0.016 (2) | −0.026 (2) |
| O7 | 0.232 (15) | 0.149 (12) | 0.209 (14) | −0.154 (12) | 0.056 (12) | −0.047 (10) |
| O8 | 0.219 (14) | 0.133 (7) | 0.067 (4) | −0.045 (10) | −0.007 (6) | 0.056 (4) |
| O9 | 0.089 (5) | 0.204 (11) | 0.161 (9) | −0.010 (6) | −0.055 (6) | −0.045 (9) |
| O10 | 0.192 (9) | 0.221 (12) | 0.103 (6) | 0.045 (9) | 0.057 (6) | −0.033 (7) |
| O7' | 0.269 (19) | 0.070 (7) | 0.220 (14) | 0.042 (9) | 0.012 (14) | 0.085 (8) |
| O8' | 0.36 (2) | 0.156 (11) | 0.31 (2) | −0.123 (13) | 0.08 (2) | −0.159 (14) |
| O9' | 0.295 (19) | 0.40 (3) | 0.248 (19) | 0.26 (2) | −0.030 (16) | 0.118 (17) |
| O10' | 0.127 (7) | 0.174 (9) | 0.251 (13) | 0.008 (7) | 0.059 (8) | −0.045 (9) |
| N1 | 0.121 (3) | 0.0387 (14) | 0.0533 (16) | 0.0026 (17) | 0.009 (2) | 0.0043 (12) |
| O20 | 0.0592 (15) | 0.0859 (19) | 0.153 (3) | 0.0080 (15) | 0.0083 (19) | 0.0404 (18) |
| C98 | 0.103 (3) | 0.065 (2) | 0.115 (4) | −0.013 (2) | −0.009 (3) | −0.008 (3) |
| C99 | 0.092 (3) | 0.070 (2) | 0.110 (4) | 0.007 (2) | 0.002 (3) | 0.013 (3) |
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