U11	U22	U33	U12	U13	U23
S1	0.01324 (17)	0.0176 (2)	0.01656 (19)	−0.00114 (14)	0.00035 (13)	0.00386 (14)
O1	0.0119 (5)	0.0242 (6)	0.0157 (5)	0.0030 (4)	0.0023 (4)	0.0016 (5)
O2	0.0130 (5)	0.0241 (6)	0.0179 (5)	0.0007 (4)	0.0025 (4)	0.0087 (5)
O3	0.0221 (6)	0.0204 (6)	0.0228 (6)	0.0036 (5)	0.0000 (4)	−0.0015 (5)
O4	0.0158 (5)	0.0291 (7)	0.0282 (6)	−0.0073 (5)	−0.0011 (4)	0.0095 (5)
Cl1	0.0251 (2)	0.0248 (2)	0.0220 (2)	0.00861 (17)	0.00412 (15)	0.00689 (16)
Cl2	0.0263 (2)	0.0171 (2)	0.0219 (2)	−0.00104 (15)	0.00333 (15)	−0.00356 (15)
Cl3	0.01544 (17)	0.0210 (2)	0.0267 (2)	0.00532 (15)	0.00114 (14)	0.00543 (16)
Cl4	0.01582 (17)	0.0237 (2)	0.02059 (19)	−0.00115 (15)	0.00512 (14)	0.00656 (15)
C1	0.0139 (7)	0.0161 (7)	0.0124 (7)	−0.0002 (6)	0.0017 (5)	−0.0024 (6)
C2	0.0122 (7)	0.0210 (8)	0.0178 (7)	−0.0024 (6)	0.0032 (5)	−0.0008 (6)
C3	0.0115 (7)	0.0231 (8)	0.0196 (8)	0.0011 (6)	0.0003 (6)	−0.0021 (6)
C4	0.0196 (7)	0.0177 (8)	0.0137 (7)	0.0047 (6)	0.0000 (6)	0.0007 (6)
C5	0.0179 (7)	0.0195 (8)	0.0175 (8)	−0.0004 (6)	0.0066 (6)	0.0017 (6)
C6	0.0120 (7)	0.0203 (8)	0.0190 (7)	0.0020 (6)	0.0048 (5)	−0.0003 (6)
C1'	0.0127 (6)	0.0173 (8)	0.0123 (7)	0.0005 (6)	0.0034 (5)	−0.0017 (6)
C2'	0.0132 (7)	0.0170 (8)	0.0149 (7)	−0.0011 (6)	0.0050 (5)	−0.0005 (6)
C3'	0.0109 (6)	0.0199 (8)	0.0144 (7)	0.0023 (6)	0.0027 (5)	−0.0021 (6)
C4'	0.0213 (7)	0.0158 (8)	0.0143 (7)	0.0018 (6)	0.0051 (6)	0.0006 (6)
C5'	0.0215 (8)	0.0166 (8)	0.0155 (7)	−0.0053 (6)	0.0067 (6)	−0.0028 (6)
C6'	0.0145 (7)	0.0186 (8)	0.0138 (7)	−0.0019 (6)	0.0034 (5)	−0.0033 (6)
C7	0.0168 (7)	0.0180 (8)	0.0152 (7)	0.0029 (6)	0.0030 (5)	0.0024 (6)
C8	0.0136 (7)	0.0145 (7)	0.0180 (7)	0.0016 (6)	0.0031 (5)	0.0009 (6)