U11	U22	U33	U12	U13	U23
F1	0.1075 (10)	0.0526 (8)	0.1018 (11)	0.0057 (7)	0.0447 (9)	−0.0015 (7)
O1	0.0905 (11)	0.0540 (10)	0.0632 (10)	−0.0054 (8)	0.0210 (9)	−0.0035 (8)
O4	0.0902 (11)	0.0533 (10)	0.0936 (12)	−0.0070 (8)	0.0364 (10)	0.0036 (8)
F2	0.1283 (12)	0.0732 (10)	0.0938 (11)	0.0039 (9)	0.0572 (9)	−0.0062 (8)
C5	0.0541 (12)	0.0410 (12)	0.0645 (14)	0.0075 (9)	0.0151 (10)	0.0029 (10)
C6	0.0572 (12)	0.0434 (12)	0.0591 (14)	0.0080 (10)	0.0183 (11)	−0.0030 (10)
C7	0.0629 (13)	0.0544 (15)	0.0648 (14)	0.0012 (11)	0.0163 (11)	0.0092 (11)
C8	0.0638 (13)	0.0511 (13)	0.0594 (14)	−0.0038 (10)	0.0160 (11)	0.0065 (11)
C9	0.0541 (11)	0.0437 (12)	0.0594 (13)	0.0057 (9)	0.0180 (10)	0.0009 (10)
C10	0.0642 (13)	0.0559 (14)	0.0602 (14)	0.0032 (11)	0.0237 (11)	0.0092 (11)
O3	0.1237 (14)	0.0769 (12)	0.0651 (11)	−0.0099 (10)	0.0422 (10)	0.0060 (9)
C12	0.0820 (15)	0.0563 (15)	0.0671 (15)	0.0027 (12)	0.0283 (13)	0.0022 (12)
C13	0.0669 (13)	0.0447 (13)	0.0606 (13)	0.0033 (10)	0.0222 (11)	−0.0028 (10)
C14	0.0573 (12)	0.0472 (13)	0.0603 (14)	0.0004 (10)	0.0178 (10)	0.0058 (10)
C15	0.0664 (13)	0.0504 (13)	0.0651 (15)	0.0049 (10)	0.0222 (11)	0.0045 (11)
C16	0.0705 (14)	0.0533 (14)	0.0684 (15)	0.0007 (11)	0.0213 (12)	0.0024 (12)
C17	0.0617 (13)	0.0541 (14)	0.0598 (14)	0.0024 (10)	0.0189 (11)	0.0093 (11)
C18	0.0670 (13)	0.0535 (13)	0.0616 (14)	0.0004 (11)	0.0158 (11)	0.0040 (11)
C19	0.0717 (14)	0.0625 (16)	0.0565 (14)	−0.0056 (12)	0.0162 (11)	0.0068 (12)
C20	0.0850 (16)	0.0688 (18)	0.0674 (16)	−0.0083 (13)	0.0134 (13)	0.0227 (13)
C21	0.0795 (15)	0.0544 (14)	0.0632 (15)	−0.0096 (11)	0.0108 (12)	0.0057 (11)
C22	0.0987 (18)	0.0635 (16)	0.0681 (17)	0.0113 (14)	0.0334 (14)	0.0018 (13)
C23	0.0922 (17)	0.0703 (18)	0.0614 (16)	0.0245 (14)	0.0337 (13)	0.0114 (12)
C24	0.0839 (16)	0.0494 (14)	0.0856 (18)	0.0006 (12)	0.0185 (14)	0.0153 (13)
C25	0.0761 (15)	0.0691 (17)	0.0772 (17)	−0.0067 (13)	0.0311 (13)	0.0148 (13)
O5	0.1470 (17)	0.0775 (13)	0.0736 (13)	−0.0049 (12)	0.0182 (12)	0.0008 (11)
C27	0.0853 (17)	0.084 (2)	0.0748 (17)	0.0039 (14)	0.0420 (14)	0.0101 (14)
O2	0.1667 (18)	0.0881 (14)	0.0632 (11)	0.0080 (13)	0.0474 (12)	0.0147 (10)
C29	0.0729 (14)	0.0639 (15)	0.0650 (15)	−0.0100 (12)	0.0087 (12)	0.0079 (12)
C30	0.0995 (19)	0.0662 (18)	0.0807 (19)	0.0013 (15)	0.0351 (16)	0.0068 (15)
C31	0.1073 (19)	0.0776 (18)	0.0566 (15)	0.0314 (15)	0.0355 (14)	0.0123 (13)
F4	0.1282 (13)	0.1394 (17)	0.1007 (12)	0.0539 (12)	0.0215 (10)	0.0341 (11)
C33	0.0932 (17)	0.0785 (19)	0.0570 (16)	0.0277 (15)	0.0305 (14)	0.0111 (13)
C34	0.1038 (19)	0.080 (2)	0.0666 (17)	0.0287 (16)	0.0325 (14)	0.0184 (14)
C35	0.0879 (18)	0.098 (2)	0.0588 (15)	0.0259 (17)	0.0311 (14)	0.0082 (15)
C36	0.0878 (18)	0.099 (2)	0.0680 (17)	0.0251 (17)	0.0271 (14)	0.0042 (16)
C37	0.0767 (15)	0.0667 (17)	0.101 (2)	0.0059 (13)	0.0291 (15)	−0.0043 (14)
C38	0.0963 (18)	0.0647 (17)	0.0798 (19)	0.0160 (14)	0.0339 (15)	0.0086 (14)
C39	0.0998 (18)	0.089 (2)	0.0597 (15)	0.0095 (16)	0.0302 (14)	0.0125 (13)
C40	0.097 (2)	0.122 (3)	0.0701 (19)	0.041 (2)	0.0291 (17)	0.0216 (19)
C41	0.107 (2)	0.088 (2)	0.0671 (18)	0.0394 (17)	0.0333 (16)	0.0119 (15)
O6	0.1315 (18)	0.0947 (18)	0.1233 (18)	0.0054 (14)	0.0425 (15)	−0.0041 (13)
F3	0.196 (2)	0.0803 (13)	0.1656 (19)	0.0409 (13)	−0.0178 (16)	0.0237 (12)
C44	0.113 (2)	0.104 (2)	0.0666 (17)	0.0101 (18)	0.0360 (15)	0.0221 (15)
C45	0.1054 (19)	0.088 (2)	0.0659 (17)	0.0096 (15)	0.0288 (14)	0.0173 (14)
C46	0.123 (2)	0.071 (2)	0.099 (2)	−0.0025 (18)	0.0245 (19)	−0.0082 (17)
C47	0.091 (2)	0.110 (3)	0.081 (2)	0.011 (2)	0.0364 (17)	−0.0005 (19)
C48	0.162 (3)	0.104 (2)	0.0699 (18)	−0.014 (2)	0.0522 (19)	0.0138 (16)
C49	0.146 (3)	0.058 (2)	0.162 (4)	0.013 (2)	0.020 (3)	−0.005 (2)
C50	0.101 (2)	0.137 (3)	0.093 (2)	0.001 (2)	0.026 (2)	−0.006 (2)
C51	0.098 (2)	0.158 (4)	0.088 (2)	0.019 (3)	0.0149 (19)	0.012 (2)
C52	0.125 (2)	0.070 (2)	0.111 (2)	0.0194 (19)	0.016 (2)	0.0157 (19)
C54	0.109 (3)	0.091 (3)	0.218 (4)	0.025 (2)	0.049 (3)	0.038 (3)
C55	0.166 (3)	0.104 (3)	0.076 (2)	−0.010 (2)	0.009 (2)	−0.0054 (18)