Skip to main content
. Author manuscript; available in PMC: 2011 Jan 11.
Published in final edited form as: Dig Tech Papers. 2009 Jun 21;2009:1626–1629. doi: 10.1109/SENSOR.2009.5285771

Figure 1.

Figure 1

The solidly mounted FBAR comprises an acoustic c zinc oxide layer on a CMOS mirror (W/SiO2) and a piezoelectri integrated circuit substrate, shown both (a) schematically and (b) realized and imaged via SEM micrograph.