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. Author manuscript; available in PMC: 2011 Jan 11.
Published in final edited form as: Dig Tech Papers. 2009 Jun 21;2009:1626–1629. doi: 10.1109/SENSOR.2009.5285771

Figure 2.

Figure 2

A single sensor of the global 6×4 FBAR-CMOS array architecture displays the Pierce oscillator topology. The FBAR equivalent circuit model is shown in the grey box, with Cm, Rm, and Lm corresponding to the motional components and Co, Rx corresponding to the intrinsic electrical properties of the zinc oxide structure.