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. Author manuscript; available in PMC: 2011 Jan 11.
Published in final edited form as: Dig Tech Papers. 2009 Jun 21;2009:1626–1629. doi: 10.1109/SENSOR.2009.5285771

Figure 5.

Figure 5

The return loss of an individual FBAR on glass (without de-embedding) shows a high-Q resonant peak at 905 MHz and a second resonant mode at 2.18 GHz. These correspond to the shear and longitudinal resonant modes, respectively, with quality factors of 113 and 129.